Sub-µm structured surfaces manufacturing using e-beam machining, X-Ray lithography, electroforming and polymer replication for micro fluidics applications

Mathias Heckele; Matthias Worgull; Timo Mappes; Guido Tosello; Tobias Metz; Jerome Gavillet; Pascal Fugier; Peter Koltay; Hans Nørgaard Hansen

Sub-µm structured surfaces manufacturing using e-beam machining, X-Ray lithography, electroforming and polymer replication for micro fluidics applications

Mathias Heckele, Matthias Worgull, Timo Mappes, Guido Tosello, Tobias Metz, Jerome Gavillet, Pascal Fugier, Peter Koltay, Hans Nørgaard Hansen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	International Conference of the European Society for Precision Engineering and Nanotechnology
Number of pages	647
Volume	2
Place of Publication	Austria
Publisher	Copy & Druck
Publication date	2008
Pages	226-230
ISBN (Print)	978-0-9553082-5-3
Publication status	Published - 2008
Event	10th International Conference of the European Society for Precision Engineering and Nanotechnology - Zürich, Switzerland Duration: 18 May 2008 → 22 May 2008 Conference number: 10

Conference

Conference	10th International Conference of the European Society for Precision Engineering and Nanotechnology
Number	10
Country/Territory	Switzerland
City	Zürich
Period	18/05/2008 → 22/05/2008

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Heckele, M., Worgull, M., Mappes, T., Tosello, G., Metz, T., Gavillet, J., Fugier, P., Koltay, P., & Hansen, H. N. (2008). Sub-µm structured surfaces manufacturing using e-beam machining, X-Ray lithography, electroforming and polymer replication for micro fluidics applications. In International Conference of the European Society for Precision Engineering and Nanotechnology (Vol. 2, pp. 226-230). Copy & Druck.

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Heckele, M, Worgull, M, Mappes, T, Tosello, G, Metz, T, Gavillet, J, Fugier, P, Koltay, P & Hansen, HN 2008, Sub-µm structured surfaces manufacturing using e-beam machining, X-Ray lithography, electroforming and polymer replication for micro fluidics applications. in International Conference of the European Society for Precision Engineering and Nanotechnology. vol. 2, Copy & Druck, Austria, pp. 226-230, 10th International Conference of the European Society for Precision Engineering and Nanotechnology, Zürich, Switzerland, 18/05/2008.

Sub-µm structured surfaces manufacturing using e-beam machining, X-Ray lithography, electroforming and polymer replication for micro fluidics applications. / Heckele, Mathias; Worgull, Matthias; Mappes, Timo et al.
International Conference of the European Society for Precision Engineering and Nanotechnology. Vol. 2 Austria: Copy & Druck, 2008. p. 226-230.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Sub-µm structured surfaces manufacturing using e-beam machining, X-Ray lithography, electroforming and polymer replication for micro fluidics applications

AU - Heckele, Mathias

AU - Worgull, Matthias

AU - Mappes, Timo

AU - Tosello, Guido

AU - Metz, Tobias

AU - Gavillet, Jerome

AU - Fugier, Pascal

AU - Koltay, Peter

AU - Hansen, Hans Nørgaard

N1 - Conference code: 10

PY - 2008

Y1 - 2008

M3 - Article in proceedings

SN - 978-0-9553082-5-3

VL - 2

SP - 226

EP - 230

BT - International Conference of the European Society for Precision Engineering and Nanotechnology

PB - Copy & Druck

CY - Austria

T2 - 10th International Conference of the European Society for Precision Engineering and Nanotechnology

Y2 - 18 May 2008 through 22 May 2008

ER -

Heckele M, Worgull M, Mappes T, Tosello G, Metz T, Gavillet J et al. Sub-µm structured surfaces manufacturing using e-beam machining, X-Ray lithography, electroforming and polymer replication for micro fluidics applications. In International Conference of the European Society for Precision Engineering and Nanotechnology. Vol. 2. Austria: Copy & Druck. 2008. p. 226-230