Sub-µm structured surfaces manufacturing using e-beam machining, X-Ray lithography, electroforming and polymer replication for micro fluidics applications

Mathias Heckele, Matthias Worgull, Timo Mappes, Guido Tosello, Tobias Metz, Jerome Gavillet, Pascal Fugier, Peter Koltay, Hans Nørgaard Hansen

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationInternational Conference of the European Society for Precision Engineering and Nanotechnology
Number of pages647
Volume2
Place of PublicationAustria
PublisherCopy & Druck
Publication date2008
Pages226-230
ISBN (Print)978-0-9553082-5-3
Publication statusPublished - 2008
Event10th International Conference of the European Society for Precision Engineering and Nanotechnology - Zürich, Switzerland
Duration: 18 May 200822 May 2008
Conference number: 10

Conference

Conference10th International Conference of the European Society for Precision Engineering and Nanotechnology
Number10
CountrySwitzerland
CityZürich
Period18/05/200822/05/2008

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