Sub-µm structured lotus surfaces manufacturing

Matthias Worgull, Mathias Heckele, Timo Mappes, B. Matthis, Guido Tosello, Tobias Metz, Jerome Gavillet, Peter Koltay, Hans Nørgaard Hansen

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

Sub-lm structured surfaces allow modifying the behavior of polymer films or components. Especially in micro-fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g., with gradients). In this paper we present the process chain to realize polymer sub-lm structures with minimum lateral feature size of 400 nm and up to 4 lm high.
Original languageEnglish
JournalMicrosystem Technologies: Micro- and Nanosystems Information Storage and Processing Systems
Volume15
Issue number8
Pages (from-to)1327-1333
ISSN0946-7076
DOIs
Publication statusPublished - 2009

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