TY - JOUR
T1 - Sub-µm structured lotus surfaces manufacturing
AU - Worgull, Matthias
AU - Heckele, Mathias
AU - Mappes, Timo
AU - Matthis, B.
AU - Tosello, Guido
AU - Metz, Tobias
AU - Gavillet, Jerome
AU - Koltay, Peter
AU - Hansen, Hans Nørgaard
PY - 2009
Y1 - 2009
N2 - Sub-lm structured surfaces allow modifying the behavior of polymer films or components. Especially in micro-fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g., with gradients). In this paper we present the process chain to realize polymer sub-lm structures with minimum lateral feature size of 400 nm and up to 4 lm high.
AB - Sub-lm structured surfaces allow modifying the behavior of polymer films or components. Especially in micro-fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g., with gradients). In this paper we present the process chain to realize polymer sub-lm structures with minimum lateral feature size of 400 nm and up to 4 lm high.
U2 - 10.1007/s00542-008-0744-7
DO - 10.1007/s00542-008-0744-7
M3 - Journal article
SN - 0946-7076
VL - 15
SP - 1327
EP - 1333
JO - Microsystem Technologies: Micro- and Nanosystems Information Storage and Processing Systems
JF - Microsystem Technologies: Micro- and Nanosystems Information Storage and Processing Systems
IS - 8
ER -