Sub-µ structured Lotus Surfaces Manufacturing

Matthias Worgull; Mathias Heckele; Timo Mappes; Bade Matthis; Guido Tosello; Tobias Metz; Jerome Gavillet; Pascal Fugier; Peter Koltay; Hans Nørgaard Hansen

Sub-µ structured Lotus Surfaces Manufacturing

Matthias Worgull
, Mathias Heckele
, Timo Mappes
, Bade Matthis
, Guido Tosello
, Tobias Metz
, Jerome Gavillet
, Pascal Fugier
, Peter Koltay
, Hans Nørgaard Hansen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patternin¬g with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 µm high.

Original language	English
Title of host publication	2008 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Place of Publication	Grenoble (France)
Publisher	EDA Publishing
Publication date	2008
Pages	330-334
ISBN (Print)	978-2-35500-006-5
Publication status	Published - 2008
Event	2008 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS - Nice, France Duration: 9 Apr 2008 → 11 Apr 2008

Conference

Conference	2008 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS
Country/Territory	France
City	Nice
Period	09/04/2008 → 11/04/2008

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@inproceedings{e6739225feea4c19bc2c4b72ad15c7af,

title = "Sub-µ structured Lotus Surfaces Manufacturing",

abstract = "Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patternin¬g with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 µm high.",

author = "Matthias Worgull and Mathias Heckele and Timo Mappes and Bade Matthis and Guido Tosello and Tobias Metz and Jerome Gavillet and Pascal Fugier and Peter Koltay and Hansen, \{Hans N{\o}rgaard\}",

year = "2008",

language = "English",

isbn = "978-2-35500-006-5",

pages = "330--334",

booktitle = "2008 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS",

publisher = "EDA Publishing",

note = "2008 Symposium on Design, Test, Integration \& Packaging of MEMS/MOEMS <br/>, DTIP2008 ; Conference date: 09-04-2008 Through 11-04-2008",

}

Worgull, M, Heckele, M, Mappes, T, Matthis, B, Tosello, G, Metz, T, Gavillet, J, Fugier, P, Koltay, P & Hansen, HN 2008, Sub-µ structured Lotus Surfaces Manufacturing. in 2008 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. EDA Publishing, Grenoble (France), pp. 330-334, 2008 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS
, Nice, France, 09/04/2008.

TY - GEN

T1 - Sub-µ structured Lotus Surfaces Manufacturing

AU - Worgull, Matthias

AU - Heckele, Mathias

AU - Mappes, Timo

AU - Matthis, Bade

AU - Tosello, Guido

AU - Metz, Tobias

AU - Gavillet, Jerome

AU - Fugier, Pascal

AU - Koltay, Peter

AU - Hansen, Hans Nørgaard

PY - 2008

Y1 - 2008

N2 - Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patternin¬g with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 µm high.

AB - Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patternin¬g with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 µm high.

M3 - Article in proceedings

SN - 978-2-35500-006-5

SP - 330

EP - 334

BT - 2008 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

PB - EDA Publishing

CY - Grenoble (France)

T2 - 2008 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS <br/>

Y2 - 9 April 2008 through 11 April 2008

ER -

Sub-µ structured Lotus Surfaces Manufacturing

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