Sub-µ structured Lotus Surfaces Manufacturing

Matthias Worgull; Mathias Heckele; Timo Mappes; Bade Matthis; Guido Tosello; Tobias Metz; Jerome Gavillet; Pascal Fugier; Peter Koltay; Hans Nørgaard Hansen

Sub-µ structured Lotus Surfaces Manufacturing

Matthias Worgull, Mathias Heckele, Timo Mappes, Bade Matthis, Guido Tosello, Tobias Metz, Jerome Gavillet, Pascal Fugier, Peter Koltay, Hans Nørgaard Hansen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patternin¬g with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 µm high.

Original language	English
Title of host publication	2008 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Place of Publication	Grenoble (France)
Publisher	EDA Publishing
Publication date	2008
Pages	330-334
ISBN (Print)	978-2-35500-006-5
Publication status	Published - 2008
Event	Design, Test, Integration & Packaging of MEMS/MOEMS Symposium - Nice (France) Duration: 1 Jan 2008 → …

Conference

Conference	Design, Test, Integration & Packaging of MEMS/MOEMS Symposium
City	Nice (France)
Period	01/01/2008 → …

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title = "Sub-µ structured Lotus Surfaces Manufacturing",

abstract = "Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patternin¬g with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 µm high.",

author = "Matthias Worgull and Mathias Heckele and Timo Mappes and Bade Matthis and Guido Tosello and Tobias Metz and Jerome Gavillet and Pascal Fugier and Peter Koltay and Hansen, {Hans N{\o}rgaard}",

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booktitle = "2008 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS",

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note = "Design, Test, Integration & Packaging of MEMS/MOEMS Symposium, DTIP2008 ; Conference date: 01-01-2008",

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Worgull, M, Heckele, M, Mappes, T, Matthis, B, Tosello, G, Metz, T, Gavillet, J, Fugier, P, Koltay, P & Hansen, HN 2008, Sub-µ structured Lotus Surfaces Manufacturing. in 2008 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. EDA Publishing, Grenoble (France), pp. 330-334, Design, Test, Integration & Packaging of MEMS/MOEMS Symposium, Nice (France), 01/01/2008. <http://documents.irevues.inist.fr/handle/2042/16917>

TY - GEN

T1 - Sub-µ structured Lotus Surfaces Manufacturing

AU - Worgull, Matthias

AU - Heckele, Mathias

AU - Mappes, Timo

AU - Matthis, Bade

AU - Tosello, Guido

AU - Metz, Tobias

AU - Gavillet, Jerome

AU - Fugier, Pascal

AU - Koltay, Peter

AU - Hansen, Hans Nørgaard

PY - 2008

Y1 - 2008

N2 - Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patternin¬g with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 µm high.

AB - Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patternin¬g with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 µm high.

M3 - Article in proceedings

SN - 978-2-35500-006-5

SP - 330

EP - 334

BT - 2008 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

PB - EDA Publishing

CY - Grenoble (France)

T2 - Design, Test, Integration & Packaging of MEMS/MOEMS Symposium

Y2 - 1 January 2008

ER -

Sub-µ structured Lotus Surfaces Manufacturing

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