Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patternin¬g with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 µm high.
|Title of host publication||2008 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS|
|Place of Publication||Grenoble (France)|
|Publication status||Published - 2008|
|Event||Design, Test, Integration & Packaging of MEMS/MOEMS Symposium - Nice (France)|
Duration: 1 Jan 2008 → …
|Conference||Design, Test, Integration & Packaging of MEMS/MOEMS Symposium|
|Period||01/01/2008 → …|