Sub-µ structured Lotus Surfaces Manufacturing

Matthias Worgull, Mathias Heckele, Timo Mappes, Bade Matthis, Guido Tosello, Tobias Metz, Jerome Gavillet, Pascal Fugier, Peter Koltay, Hans Nørgaard Hansen

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review


Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patternin¬g with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 µm high.
Original languageEnglish
Title of host publication2008 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Place of PublicationGrenoble (France)
PublisherEDA Publishing
Publication date2008
ISBN (Print)978-2-35500-006-5
Publication statusPublished - 2008
EventDesign, Test, Integration & Packaging of MEMS/MOEMS Symposium - Nice (France)
Duration: 1 Jan 2008 → …


ConferenceDesign, Test, Integration & Packaging of MEMS/MOEMS Symposium
CityNice (France)
Period01/01/2008 → …


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