Abstract
Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patternin¬g with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 µm high.
Original language | English |
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Title of host publication | 2008 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS |
Place of Publication | Grenoble (France) |
Publisher | EDA Publishing |
Publication date | 2008 |
Pages | 330-334 |
ISBN (Print) | 978-2-35500-006-5 |
Publication status | Published - 2008 |
Event | 2008 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS - Nice, France Duration: 9 Apr 2008 → 11 Apr 2008 |
Conference
Conference | 2008 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS |
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Country/Territory | France |
City | Nice |
Period | 09/04/2008 → 11/04/2008 |