SU-8 cantilevers for bio/chemical sensing; Fabrication, characterisation and development of novel read-out methods

M. Nordström, Stephan Urs Keller, Michael Lillemose, A. Johansson, Søren Dohn, D. Haefliger, Gabriela Blagoi, M. Havsteen-Jakobsen, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    Here, we present the activities within our research group over the last five years with cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interesting polymer for fabrication of cantilevers for bio/chemical sensing due to its simple processing and low Young's modulus. We show examples of different integrated read-out methods and their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity to changes in the environmental temperature and pH of the buffer solution. Moreover, we show that the SU-8 cantilever surface can be functionalised directly with receptor molecules for analyte detection, thereby avoiding gold-thiol chemistry.
    Original languageEnglish
    JournalSensors
    Volume8
    Issue number3
    Pages (from-to)1595-1612
    ISSN1424-8220
    DOIs
    Publication statusPublished - 2008

    Keywords

    • SU-8
    • cantilever based sensing
    • label-free

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