SU-8 Cantilever Sensor System with Integrated Readout

Alicia Johansson, Montserrat Gomez, Peter Rasmussen, Anja Boisen

    Research output: Contribution to journalJournal articlepeer-review

    Original languageEnglish
    JournalSensors and Actuators A. Physical
    Issue number123-124
    Pages (from-to)111-115
    Publication statusPublished - 2005

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