SU-8 cantielver sensor with integrated read-out

Alicia Johansson, Montserrat Gomez, Peter Rasmussen, Rodolphe Charly Willy Marie, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of MicroTAS 2004
    Publication date2004
    Pages488-490
    Publication statusPublished - 2004

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