SU-8 Based Piezoresistive Mechanical Sensor

Jacob Thaysen, Arda Deniz Yalcinkaya, R.K. Vestergaard, Søren Jensen

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    We present the first SU-8 based piezoresistive mechanical sensor. Conventionally, silicon has been used as a piezoresistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that SU-8 is much softer than silicon and that a gold resistor is easily incorporated in SU-8, we have proven that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezoresistive cantilever. We demonstrate the chip fabrication, and characterization with respect to sensitivity, noise and device failure.
    Original languageEnglish
    Title of host publicationThe Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, 2002.
    Publication date2002
    ISBN (Print)0-7803-7185-2
    Publication statusPublished - 2002
    Event15th IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, United States
    Duration: 20 Jan 200224 Jan 2002
    Conference number: 15


    Conference15th IEEE International Conference on Micro Electro Mechanical Systems
    CountryUnited States
    CityLas Vegas, NV

    Bibliographical note

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