SU-8 Based Piezoresistive Mechanical Sensor

Jacob Thaysen, Arda Deniz Yalcinkaya, R.K. Vestergaard, Søren Jensen

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    Abstract

    We present the first SU-8 based piezoresistive mechanical sensor. Conventionally, silicon has been used as a piezoresistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that SU-8 is much softer than silicon and that a gold resistor is easily incorporated in SU-8, we have proven that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezoresistive cantilever. We demonstrate the chip fabrication, and characterization with respect to sensitivity, noise and device failure.
    Original languageEnglish
    Title of host publicationThe Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, 2002.
    PublisherIEEE
    Publication date2002
    ISBN (Print)0-7803-7185-2
    DOIs
    Publication statusPublished - 2002
    Event15th IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, United States
    Duration: 20 Jan 200224 Jan 2002
    Conference number: 15

    Conference

    Conference15th IEEE International Conference on Micro Electro Mechanical Systems
    Number15
    CountryUnited States
    CityLas Vegas, NV
    Period20/01/200224/01/2002

    Bibliographical note

    Copyright: 2002 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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