Strukturmodifizierung von TiN Hartstoffschichten durch zeitliche variation der Abscheideparameter

Karen Pantleon, Peggy John, Hagen Sahm, Heinrich Oettel

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Werkstoffwoche
Publication date	1997
Pages	799-804
Publication status	Published - 1997
Event	Werkstoffwoche 96 - Stuttgart, Germany Duration: 28 May 1996 → 31 May 1996

OpenUrl availability

@inproceedings{fc29cf6bb3bd4cbc9c34eabb8af89671,

title = "Strukturmodifizierung von TiN Hartstoffschichten durch zeitliche variation der Abscheideparameter",

author = "Karen Pantleon and Peggy John and Hagen Sahm and Heinrich Oettel",

year = "1997",

language = "English",

pages = "799--804",

booktitle = "Werkstoffwoche",

note = "Werkstoffwoche 96 ; Conference date: 28-05-1996 Through 31-05-1996",

}