Structured synthesis of MEMS using evolutionary approaches

Zhun Fan, Jiachuan Wang, Sofiane Achiche, Eric Goodman, Ronald Rosenberg

    Research output: Contribution to journalJournal articleResearchpeer-review


    In this paper, we discuss the hierarchy that is involved in a typical MEMS design and how evolutionary approaches can be used to automate the hierarchical synthesis process for MEMS. The paper first introduces the flow of a structured MEMS design process and emphasizes that system-level lumped-parameter model synthesis is the first step of the MEMS synthesis process. At the system level, an approach combining bond graphs and genetic programming can lead to satisfactory design candidates as system-level models that meet the predefined behavioral specifications for designers to trade off. Then at the physical layout synthesis level, the selection of geometric parameters for component devices and other design variables is formulated as a constrained optimization problem and addressed using a constrained genetic algorithm approach. A multiple-resonator microsystem design is used to illustrate the integrated design automation idea using these evolutionary approaches.
    Original languageEnglish
    JournalApplied Soft Computing
    Issue number1
    Pages (from-to)579-589
    Publication statusPublished - 2008


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