Structural characterization and dielectric properties of BaTiO3 thin films obtained by spin coating

Branimir Bajac, Jelena Vukmirovic, Dordije Tripkovic, Elvira Djurdjic, Jovana Stanojev, Željka Cvejic, Branko Škoric, Vladimir V. Srdic

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Abstract

Barium titanate thin films were prepared by spin coating deposition technique of an acetic precursor sol and sintered at 750, 900 and 1050 °C. Phase composition of the obtained thin films was characterized by X-ray diffraction and Raman spectroscopy. Their morphology was analysed by scanning electron microscopy and atomic force microscopy. Dielectric properties of thin films sintered at 750 and 900 °C were characterized by LCD device, where the influence of sintering temperature on dielectric permittivity and loss tangent was inspected. It was concluded that higher sintering temperature increases grain size and amount of tetragonal phase, hence higher relative permittivity was recorded. The almost constant relative permittivity in the measured frequency (800Hz–0.5MHz) and temperature (25–200 °C) ranges as well as low dielectric loss are very important for the application of BaTiO3 films in microelectronic devices.
Original languageEnglish
JournalProcessing and Application of Ceramics
Volume8
Issue number4
Pages (from-to)219-224
ISSN1820-6131
DOIs
Publication statusPublished - 2014
Externally publishedYes

Cite this

Bajac, B., Vukmirovic, J., Tripkovic, D., Djurdjic, E., Stanojev, J., Cvejic, Ž., Škoric, B., & Srdic, V. V. (2014). Structural characterization and dielectric properties of BaTiO3 thin films obtained by spin coating. Processing and Application of Ceramics, 8(4), 219-224. https://doi.org/10.2298/PAC1404219B