Status of the silicon pore optics technology

Maximilien J. Collon; Giuseppe Vacanti; Nicolas M. Barriere; Boris Landgraf; Ramses Günther; Mark Vervest; Luc Voruz; Sjoerd Verhoeckx; Ljubiša  Babić; Laurens Keek; David Alain Girou; Ben Okma; Enrico Hauser; Marco W. Beijersbergen; Marcos Bavdaz; Eric Wille; Sebastiaan Fransen; Brian Shortt; Ivo Ferreira; Jeroen Haneveld; Arenda Koelewijn; Ronald Start; Maurice Wijnperle; Jan-Joost Lankwarden; Coen van Baren; Paul Hieltjes; Jan Willem den Herder; Peter Müller; Evelyn Handick; Michael Krumrey; Miranda Bradshaw; Vadim Burwitz; Giovanni Pareschi; Sonny Massahi; Sara Svendsen; Desiree Della Monica Ferreira; Finn Erland Christensen; Giuseppe Valsecchi; Paul Oliver; Ian Chequer; Kevin Ball

doi:10.1117/12.2530696

Status of the silicon pore optics technology

Maximilien J. Collon^*, Giuseppe Vacanti, Nicolas M. Barriere, Boris Landgraf, Ramses Günther, Mark Vervest, Luc Voruz, Sjoerd Verhoeckx, Ljubiša Babić, Laurens Keek, David Alain Girou, Ben Okma, Enrico Hauser, Marco W. Beijersbergen, Marcos Bavdaz, Eric Wille, Sebastiaan Fransen, Brian Shortt, Ivo Ferreira, Jeroen HaneveldArenda Koelewijn, Ronald Start, Maurice Wijnperle, Jan-Joost Lankwarden, Coen van Baren, Paul Hieltjes, Jan Willem den Herder, Peter Müller, Evelyn Handick, Michael Krumrey, Miranda Bradshaw, Vadim Burwitz, Giovanni Pareschi, Sonny Massahi, Sara Svendsen, Desiree Della Monica Ferreira, Finn Erland Christensen, Giuseppe Valsecchi, Paul Oliver, Ian Chequer, Kevin Ball

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Abstract

Silicon Pore Optics (SPO) uses commercially available monocrystalline double-sided super-polished silicon wafers as a basis to produce mirrors that form lightweight and stiff high-resolution x-ray optics. The technology has been invented by cosine and the European Space Agency (ESA) and developed together with scientific and industrial partners to mass production levels. SPO is an enabling element for large space-based x-ray telescopes such as Athena and ARCUS, operating in the 0.2 to 12 keV band, with angular resolution requirements up to 5 arc seconds. SPO has also shown to be a versatile technology that can be further developed for gamma-ray optics, medical applications and for material research. This paper will summarise the status of the technology and of the mass production capabilities, show latest performance results and discuss the next steps in the development.

Original language	English
Title of host publication	Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX
Editors	Stephen L. O'Dell , Giovanni Pareschi
Number of pages	8
Volume	11119
Publisher	SPIE - International Society for Optical Engineering
Publication date	2019
Pages	111190L-1-11190L-8
DOIs	https://doi.org/10.1117/12.2530696
Publication status	Published - 2019
Event	SPIE Optical Engineering + Applications 2019 - San Diego, United States Duration: 11 Aug 2019 → 15 Aug 2019

Conference

Conference	SPIE Optical Engineering + Applications 2019
Country/Territory	United States
City	San Diego
Period	11/08/2019 → 15/08/2019

Series	Proceedings of SPIE - The International Society for Optical Engineering
ISSN	0277-786X

Keywords

X-ray optics
X-ray astronomy
Silicon
Wafer
Stack
Pore optics
X-ray telescopes
ATHENA
ARCUS
SPO

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Collon, M. J., Vacanti, G., Barriere, N. M., Landgraf, B., Günther, R., Vervest, M., Voruz, L., Verhoeckx, S., Babić, L., Keek, L., Girou, D. A., Okma, B., Hauser, E., Beijersbergen, M. W., Bavdaz, M., Wille, E., Fransen, S., Shortt, B., Ferreira, I., ... Ball, K. (2019). Status of the silicon pore optics technology. In S. L. OD., & G. P. (Eds.), Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX (Vol. 11119, pp. 111190L-1-11190L-8). SPIE - International Society for Optical Engineering. https://doi.org/10.1117/12.2530696

Collon, Maximilien J. ; Vacanti, Giuseppe ; Barriere, Nicolas M. et al. / Status of the silicon pore optics technology. Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX. editor / Stephen L. O'Dell ; Giovanni Pareschi. Vol. 11119 SPIE - International Society for Optical Engineering, 2019. pp. 111190L-1-11190L-8 (Proceedings of SPIE - The International Society for Optical Engineering).

@inproceedings{76d645a305ae43059c247c0abfd2201c,

title = "Status of the silicon pore optics technology",

abstract = "Silicon Pore Optics (SPO) uses commercially available monocrystalline double-sided super-polished silicon wafers as a basis to produce mirrors that form lightweight and stiff high-resolution x-ray optics. The technology has been invented by cosine and the European Space Agency (ESA) and developed together with scientific and industrial partners to mass production levels. SPO is an enabling element for large space-based x-ray telescopes such as Athena and ARCUS, operating in the 0.2 to 12 keV band, with angular resolution requirements up to 5 arc seconds. SPO has also shown to be a versatile technology that can be further developed for gamma-ray optics, medical applications and for material research. This paper will summarise the status of the technology and of the mass production capabilities, show latest performance results and discuss the next steps in the development.",

keywords = "X-ray optics, X-ray astronomy, Silicon, Wafer, Stack, Pore optics, X-ray telescopes, ATHENA, ARCUS, SPO",

author = "Collon, {Maximilien J.} and Giuseppe Vacanti and Barriere, {Nicolas M.} and Boris Landgraf and Ramses G{\"u}nther and Mark Vervest and Luc Voruz and Sjoerd Verhoeckx and Ljubi{\v s}a Babi{\'c} and Laurens Keek and Girou, {David Alain} and Ben Okma and Enrico Hauser and Beijersbergen, {Marco W.} and Marcos Bavdaz and Eric Wille and Sebastiaan Fransen and Brian Shortt and Ivo Ferreira and Jeroen Haneveld and Arenda Koelewijn and Ronald Start and Maurice Wijnperle and Jan-Joost Lankwarden and {van Baren}, Coen and Paul Hieltjes and {den Herder}, {Jan Willem} and Peter M{\"u}ller and Evelyn Handick and Michael Krumrey and Miranda Bradshaw and Vadim Burwitz and Giovanni Pareschi and Sonny Massahi and Sara Svendsen and {Della Monica Ferreira}, Desiree and Christensen, {Finn Erland} and Giuseppe Valsecchi and Paul Oliver and Ian Chequer and Kevin Ball",

year = "2019",

doi = "10.1117/12.2530696",

language = "English",

volume = "11119",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE - International Society for Optical Engineering",

pages = "111190L--1--11190L--8",

editor = "{Stephen L. O'Dell} and {Giovanni Pareschi}",

booktitle = "Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX",

note = "SPIE Optical Engineering + Applications 2019, Optics + Photonics 2019 ; Conference date: 11-08-2019 Through 15-08-2019",

}

Collon, MJ, Vacanti, G, Barriere, NM, Landgraf, B, Günther, R, Vervest, M, Voruz, L, Verhoeckx, S, Babić, L, Keek, L, Girou, DA, Okma, B, Hauser, E, Beijersbergen, MW, Bavdaz, M, Wille, E, Fransen, S, Shortt, B, Ferreira, I, Haneveld, J, Koelewijn, A, Start, R, Wijnperle, M, Lankwarden, J-J, van Baren, C, Hieltjes, P, den Herder, JW, Müller, P, Handick, E, Krumrey, M, Bradshaw, M, Burwitz, V, Pareschi, G, Massahi, S , Svendsen, S , Della Monica Ferreira, D , Christensen, FE, Valsecchi, G, Oliver, P, Chequer, I & Ball, K 2019, Status of the silicon pore optics technology. in SLOD & GP (eds), Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX. vol. 11119, SPIE - International Society for Optical Engineering, Proceedings of SPIE - The International Society for Optical Engineering, pp. 111190L-1-11190L-8, SPIE Optical Engineering + Applications 2019, San Diego, California, United States, 11/08/2019. https://doi.org/10.1117/12.2530696

Status of the silicon pore optics technology. / Collon, Maximilien J.; Vacanti, Giuseppe; Barriere, Nicolas M. et al.
Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX. ed. / Stephen L. O'Dell; Giovanni Pareschi. Vol. 11119 SPIE - International Society for Optical Engineering, 2019. p. 111190L-1-11190L-8 (Proceedings of SPIE - The International Society for Optical Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Status of the silicon pore optics technology

AU - Collon, Maximilien J.

AU - Vacanti, Giuseppe

AU - Barriere, Nicolas M.

AU - Landgraf, Boris

AU - Günther, Ramses

AU - Vervest, Mark

AU - Voruz, Luc

AU - Verhoeckx, Sjoerd

AU - Babić, Ljubiša

AU - Keek, Laurens

AU - Girou, David Alain

AU - Okma, Ben

AU - Hauser, Enrico

AU - Beijersbergen, Marco W.

AU - Bavdaz, Marcos

AU - Wille, Eric

AU - Fransen, Sebastiaan

AU - Shortt, Brian

AU - Ferreira, Ivo

AU - Haneveld, Jeroen

AU - Koelewijn, Arenda

AU - Start, Ronald

AU - Wijnperle, Maurice

AU - Lankwarden, Jan-Joost

AU - van Baren, Coen

AU - Hieltjes, Paul

AU - den Herder, Jan Willem

AU - Müller, Peter

AU - Handick, Evelyn

AU - Krumrey, Michael

AU - Bradshaw, Miranda

AU - Burwitz, Vadim

AU - Pareschi, Giovanni

AU - Massahi, Sonny

AU - Svendsen, Sara

AU - Della Monica Ferreira, Desiree

AU - Christensen, Finn Erland

AU - Valsecchi, Giuseppe

AU - Oliver, Paul

AU - Chequer, Ian

AU - Ball, Kevin

PY - 2019

Y1 - 2019

N2 - Silicon Pore Optics (SPO) uses commercially available monocrystalline double-sided super-polished silicon wafers as a basis to produce mirrors that form lightweight and stiff high-resolution x-ray optics. The technology has been invented by cosine and the European Space Agency (ESA) and developed together with scientific and industrial partners to mass production levels. SPO is an enabling element for large space-based x-ray telescopes such as Athena and ARCUS, operating in the 0.2 to 12 keV band, with angular resolution requirements up to 5 arc seconds. SPO has also shown to be a versatile technology that can be further developed for gamma-ray optics, medical applications and for material research. This paper will summarise the status of the technology and of the mass production capabilities, show latest performance results and discuss the next steps in the development.

AB - Silicon Pore Optics (SPO) uses commercially available monocrystalline double-sided super-polished silicon wafers as a basis to produce mirrors that form lightweight and stiff high-resolution x-ray optics. The technology has been invented by cosine and the European Space Agency (ESA) and developed together with scientific and industrial partners to mass production levels. SPO is an enabling element for large space-based x-ray telescopes such as Athena and ARCUS, operating in the 0.2 to 12 keV band, with angular resolution requirements up to 5 arc seconds. SPO has also shown to be a versatile technology that can be further developed for gamma-ray optics, medical applications and for material research. This paper will summarise the status of the technology and of the mass production capabilities, show latest performance results and discuss the next steps in the development.

KW - X-ray optics

KW - X-ray astronomy

KW - Silicon

KW - Wafer

KW - Stack

KW - Pore optics

KW - X-ray telescopes

KW - ATHENA

KW - ARCUS

KW - SPO

U2 - 10.1117/12.2530696

DO - 10.1117/12.2530696

M3 - Article in proceedings

VL - 11119

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 111190L-1-11190L-8

BT - Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX

A2 - , Stephen L. O'Dell

A2 - , Giovanni Pareschi

PB - SPIE - International Society for Optical Engineering

T2 - SPIE Optical Engineering + Applications 2019

Y2 - 11 August 2019 through 15 August 2019

ER -

Collon MJ, Vacanti G, Barriere NM, Landgraf B, Günther R, Vervest M et al. Status of the silicon pore optics technology. In SLOD, GP, editors, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX. Vol. 11119. SPIE - International Society for Optical Engineering. 2019. p. 111190L-1-11190L-8. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2530696

Status of the silicon pore optics technology

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