Static Contact Micro Four-Point Probes with <11 nm positioning repeatability

Dirch Hjorth Petersen, Ole Hansen, Torben Mikael Hansen, Peter Rasmus Ebsen Petersen, Peter Bøggild

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalMicroelectronic Engineering
Volume85
Issue number5-6
Pages (from-to)1092-1095
ISSN0167-9317
DOIs
Publication statusPublished - 2008

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