Static Contact Micro Four-Point Probes with <11 nm positioning repeatability

Dirch Hjorth Petersen, Ole Hansen, Torben Mikael Hansen, Peter Rasmus Ebsen Petersen, Peter Bøggild

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalMicroelectronic Engineering
Volume85
Issue number5-6
Pages (from-to)1092-1095
ISSN0167-9317
DOIs
Publication statusPublished - 2008

Cite this

Petersen, Dirch Hjorth ; Hansen, Ole ; Hansen, Torben Mikael ; Petersen, Peter Rasmus Ebsen ; Bøggild, Peter. / Static Contact Micro Four-Point Probes with <11 nm positioning repeatability. In: Microelectronic Engineering. 2008 ; Vol. 85, No. 5-6. pp. 1092-1095.
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Static Contact Micro Four-Point Probes with <11 nm positioning repeatability. / Petersen, Dirch Hjorth; Hansen, Ole; Hansen, Torben Mikael; Petersen, Peter Rasmus Ebsen; Bøggild, Peter.

In: Microelectronic Engineering, Vol. 85, No. 5-6, 2008, p. 1092-1095.

Research output: Contribution to journalJournal articleResearchpeer-review

TY - JOUR

T1 - Static Contact Micro Four-Point Probes with <11 nm positioning repeatability

AU - Petersen, Dirch Hjorth

AU - Hansen, Ole

AU - Hansen, Torben Mikael

AU - Petersen, Peter Rasmus Ebsen

AU - Bøggild, Peter

PY - 2008

Y1 - 2008

U2 - 10.1016/j.mee.2007.12.077

DO - 10.1016/j.mee.2007.12.077

M3 - Journal article

VL - 85

SP - 1092

EP - 1095

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

IS - 5-6

ER -