Sputtering yields and energy distributions from nonoverlapping subspikes in ion bombarded volatile solids

O. Ellegaard, Jørgen Schou, B. Stenum, H. Sørensen, R. Pedrys

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	62
Pages (from-to)	447-455
ISSN	0168-583X
Publication status	Published - 1992

OpenUrl availability

@article{1bbcf974e1c44d939e7697721605a33d,

title = "Sputtering yields and energy distributions from nonoverlapping subspikes in ion bombarded volatile solids",

keywords = "Materialers atomare struktur og egenskaber; Optik og fluid dynamik",

author = "O. Ellegaard and J{\o}rgen Schou and B. Stenum and H. S{\o}rensen and R. Pedrys",

year = "1992",

language = "English",

volume = "62",

pages = "447--455",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

}

Research output: Contribution to journal › Journal article › Research › peer-review

TY - JOUR

T1 - Sputtering yields and energy distributions from nonoverlapping subspikes in ion bombarded volatile solids

AU - Ellegaard, O.

AU - Schou, Jørgen

AU - Stenum, B.

AU - Sørensen, H.

AU - Pedrys, R.

PY - 1992

Y1 - 1992

KW - Materialers atomare struktur og egenskaber; Optik og fluid dynamik

M3 - Journal article

SN - 0168-583X

VL - 62

SP - 447

EP - 455

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

ER -