Sputtering of thin and intermediately thick films of solid deuterium by keV electrons

Winnie Edith Svendsen, Birgitte Thestrup Nielsen, Jørgen Schou, Ole Ellegaard

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    Abstract

    Sputtering of films of solid deuterium by keV electrons was studied in a cryogenic set-up. The sputtering yield shows a minimum yield of about 4 D2/electron for 1.5 and 2 keV electrons at a thickness slightly larger than the average projected range of the electrons. We suggest that the yield around the minimum represents the value closest to a bulk-yield induced by electron bombardment. It may also include contributions from the mechanisms that enhance the yield for thin and very thick films.
    Original languageEnglish
    JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
    Volume101
    Issue number1-2
    Pages (from-to)174-178
    ISSN0168-583X
    DOIs
    Publication statusPublished - 1995
    Event6th International Workshop on Desorption Induced by Electronic Transitions - Krakow, Poland
    Duration: 25 Sept 199428 Sept 1994
    Conference number: 6

    Workshop

    Workshop6th International Workshop on Desorption Induced by Electronic Transitions
    Number6
    Country/TerritoryPoland
    CityKrakow
    Period25/09/199428/09/1994

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