Sputtering of Thick Deuterium Films by KeV Electrons

Birgitte Thestrup Nielsen, Winnie Edith Svendsen, Jørgen Schou, Ole Ellegaard

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    Abstract

    Sputtering of thick films of solid deuterium up to several μm by keV electrons is reported for the first time. The sputtering yield increases within a narrow range of thicknesses around 1.6 μm by about 2 orders of magnitude for 1.5 keV electrons. A similar behavior has not been observed for ion bombardment. The yield enhancement is accompanied by an increasing electron accumulation in the film.
    Original languageEnglish
    JournalPhysical Review Letters
    Volume73
    Issue number10
    Pages (from-to)1444-1447
    ISSN0031-9007
    DOIs
    Publication statusPublished - 1994

    Bibliographical note

    Copyright 1994 American Physical Society

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