Sputtering of solid nitrogen by keV helium ions

O. Ellegaard, Jørgen Schou, H. Sørensen, R. Pedrys, B. Warczak

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    Solid nitrogen has become a standard material among the frozen molecular gases for electronic sputtering. We have combined measurements of sputtering yields and energy spectra from nitrogen bombarded by 4-10 keV helium ions. The data show that the erosion is electronic rather than knockon (collisional) sputtering. The sputtering yields induced by He-3+ and He-4+ ions of equal velocity are almost the same. The magnitude of the yields is about 20 N2 molecules/He+ ion. Most of the sputtered particles are molecules, but also atoms are emitted. For molecules, the energy distribution is similar to that for electron incidence, but differs considerably from that of bombardment by medium mass ions.
    Original languageEnglish
    JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
    Issue number1-4
    Pages (from-to)192-197
    Publication statusPublished - 1993
    Event9th International Workshop on Inelastic Ion Surface Collisions - Centre Paul Langevin, Aussois, France
    Duration: 14 Sep 199218 Sep 1992
    Conference number: 9


    Workshop9th International Workshop on Inelastic Ion Surface Collisions
    LocationCentre Paul Langevin

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