Sputtering of solid neon by keV hydrogen ions

Ole Ellegaard, Jørgen Schou, H. Sørensen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    Sputtering of solid Ne with the hydrogen ions H+1, H+2 and H+3 in the energy range 1–10 keV/atom has been studied by means of a quartz microbalance technique. No enhancement in the yield per atom for molecular ions was found. The results for hydrogen ions are compared with data for keV electrons. The thickness dependence of the yield is almost the same for the two types of bombarding particles. The energy dependence as well as the absolute magnitude of the yield are discussed on the basis of mobile electronic excitations.
    Original languageEnglish
    JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
    Volume13
    Issue number1-3
    Pages (from-to)567-571
    ISSN0168-583X
    Publication statusPublished - 1986

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