Sputtering of solid neon by keV hydrogen ions

Ole Ellegaard; Jørgen Schou; H. Sørensen

doi:10.1016/0168-583X(86)90567-7

Sputtering of solid neon by keV hydrogen ions

Ole Ellegaard, Jørgen Schou, H. Sørensen

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Abstract

Sputtering of solid Ne with the hydrogen ions H+1, H+2 and H+3 in the energy range 1–10 keV/atom has been studied by means of a quartz microbalance technique. No enhancement in the yield per atom for molecular ions was found. The results for hydrogen ions are compared with data for keV electrons. The thickness dependence of the yield is almost the same for the two types of bombarding particles. The energy dependence as well as the absolute magnitude of the yield are discussed on the basis of mobile electronic excitations.

Original language	English
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	13
Issue number	1-3
Pages (from-to)	567-571
ISSN	0168-583X
DOIs	https://doi.org/10.1016/0168-583X(86)90567-7
Publication status	Published - 1986

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title = "Sputtering of solid neon by keV hydrogen ions",

abstract = "Sputtering of solid Ne with the hydrogen ions H+1, H+2 and H+3 in the energy range 1–10 keV/atom has been studied by means of a quartz microbalance technique. No enhancement in the yield per atom for molecular ions was found. The results for hydrogen ions are compared with data for keV electrons. The thickness dependence of the yield is almost the same for the two types of bombarding particles. The energy dependence as well as the absolute magnitude of the yield are discussed on the basis of mobile electronic excitations.",

author = "Ole Ellegaard and J{\o}rgen Schou and H. S{\o}rensen",

year = "1986",

doi = "10.1016/0168-583X(86)90567-7",

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pages = "567--571",

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T1 - Sputtering of solid neon by keV hydrogen ions

AU - Ellegaard, Ole

AU - Schou, Jørgen

AU - Sørensen, H.

PY - 1986

Y1 - 1986

N2 - Sputtering of solid Ne with the hydrogen ions H+1, H+2 and H+3 in the energy range 1–10 keV/atom has been studied by means of a quartz microbalance technique. No enhancement in the yield per atom for molecular ions was found. The results for hydrogen ions are compared with data for keV electrons. The thickness dependence of the yield is almost the same for the two types of bombarding particles. The energy dependence as well as the absolute magnitude of the yield are discussed on the basis of mobile electronic excitations.

AB - Sputtering of solid Ne with the hydrogen ions H+1, H+2 and H+3 in the energy range 1–10 keV/atom has been studied by means of a quartz microbalance technique. No enhancement in the yield per atom for molecular ions was found. The results for hydrogen ions are compared with data for keV electrons. The thickness dependence of the yield is almost the same for the two types of bombarding particles. The energy dependence as well as the absolute magnitude of the yield are discussed on the basis of mobile electronic excitations.

U2 - 10.1016/0168-583X(86)90567-7

DO - 10.1016/0168-583X(86)90567-7

M3 - Journal article

SN - 0168-583X

VL - 13

SP - 567

EP - 571

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

IS - 1-3

ER -

Sputtering of solid neon by keV hydrogen ions

Abstract

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