Sputtering of solid neon and argon by medium mass ions

Jørgen Schou; O. Ellegaard; R. Pedrys; H. Sørensen

doi:10.1016/0168-583X(92)95030-U

Sputtering of solid neon and argon by medium mass ions

Jørgen Schou, O. Ellegaard, R. Pedrys, H. Sørensen

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

Frozen neon and argon have been bombarded by neon and argon ions at energies between 4 and 10 keV. The sputtering yields range from 2 × 10⁴ atoms/ion for neon bombardment of solid neon to about 800 atoms/ion for that of solid argon. No existing treatment can account for the magnitude of the yield as well as the energy dependence of the yield.

Original language	English
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	65
Issue number	1-4
Pages (from-to)	173-176
ISSN	0168-583X
DOIs	https://doi.org/10.1016/0168-583X(92)95030-U
Publication status	Published - 1992

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title = "Sputtering of solid neon and argon by medium mass ions",

abstract = "Frozen neon and argon have been bombarded by neon and argon ions at energies between 4 and 10 keV. The sputtering yields range from 2 × 104 atoms/ion for neon bombardment of solid neon to about 800 atoms/ion for that of solid argon. No existing treatment can account for the magnitude of the yield as well as the energy dependence of the yield.",

keywords = "Optik og fluid dynamik; Materialers atomare struktur og egenskaber",

author = "J{\o}rgen Schou and O. Ellegaard and R. Pedrys and H. S{\o}rensen",

year = "1992",

doi = "10.1016/0168-583X(92)95030-U",

language = "English",

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pages = "173--176",

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T1 - Sputtering of solid neon and argon by medium mass ions

AU - Schou, Jørgen

AU - Ellegaard, O.

AU - Pedrys, R.

AU - Sørensen, H.

PY - 1992

Y1 - 1992

N2 - Frozen neon and argon have been bombarded by neon and argon ions at energies between 4 and 10 keV. The sputtering yields range from 2 × 104 atoms/ion for neon bombardment of solid neon to about 800 atoms/ion for that of solid argon. No existing treatment can account for the magnitude of the yield as well as the energy dependence of the yield.

AB - Frozen neon and argon have been bombarded by neon and argon ions at energies between 4 and 10 keV. The sputtering yields range from 2 × 104 atoms/ion for neon bombardment of solid neon to about 800 atoms/ion for that of solid argon. No existing treatment can account for the magnitude of the yield as well as the energy dependence of the yield.

KW - Optik og fluid dynamik; Materialers atomare struktur og egenskaber

U2 - 10.1016/0168-583X(92)95030-U

DO - 10.1016/0168-583X(92)95030-U

M3 - Journal article

SN - 0168-583X

VL - 65

SP - 173

EP - 176

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

IS - 1-4

ER -

Sputtering of solid neon and argon by medium mass ions

Abstract

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