Sputtering of solid neon and argon by medium mass ions

Jørgen Schou, O. Ellegaard, R. Pedrys, H. Sørensen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
    Volume65
    Pages (from-to)173-176
    ISSN0168-583X
    Publication statusPublished - 1992

    Cite this