Sputtering of insulators

    Research output: Contribution to conferenceConference abstract for conferenceResearch

    Original languageEnglish
    Publication date1997
    Publication statusPublished - 1997
    EventScanning microscopy 1997 meeting - Chicago, IL (US), 10-15 May
    Duration: 1 Jan 1997 → …

    Conference

    ConferenceScanning microscopy 1997 meeting
    CityChicago, IL (US), 10-15 May
    Period01/01/1997 → …

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