Sputtering of Frozen Gases

Jørgen Schou

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	27
Issue number	1
Pages (from-to)	188-200
ISSN	0168-583X
DOIs	https://doi.org/10.1016/0168-583X(87)90020-6
Publication status	Published - 1987

Access to Document

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title = "Sputtering of Frozen Gases",

author = "J{\o}rgen Schou",

year = "1987",

doi = "10.1016/0168-583X(87)90020-6",

language = "English",

volume = "27",

pages = "188--200",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

number = "1",

}

TY - JOUR

T1 - Sputtering of Frozen Gases

AU - Schou, Jørgen

PY - 1987

Y1 - 1987

U2 - 10.1016/0168-583X(87)90020-6

DO - 10.1016/0168-583X(87)90020-6

M3 - Journal article

SN - 0168-583X

VL - 27

SP - 188

EP - 200

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

IS - 1

ER -