Sputtering by excimer production from solid krypton

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    Abstract

    The ejection process in solid krypton following electronic de-excitation has been studied with molecular-dynamics simulations. We have introduced a new model for the excimer formation that includes the interaction between the excimer and the lattice. The excimer migrates up to 5 Å before it decays radiatively to the repulsive part of the ground state. Long-range collision sequences along lattice rows contribute significantly to the sputtering yield. The kinetic-energy distribution of sputtered particles based on this model agrees well with the experimental spectrum.
    Original languageEnglish
    JournalEPL
    Volume27
    Issue number4
    Pages (from-to)323-328
    ISSN0295-5075
    DOIs
    Publication statusPublished - 1994

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