Sputtered Clusters from Niobium-Vanadium Alloys

Jørgen Schou, W. O. Hofer

    Research output: Contribution to journalJournal articleResearchpeer-review


    A series of Nb&z.sbnd;V alloys have been irradiated by 6 keV argon ions. Homonuclear and heteronuclear clusters emitted from these alloys have been studied by means of post-ionization and/or secondary ion mass spectrometry. The intensity of clusters of atomic masses up to approximately 300 amu was related to the concentrations of Nb and V in the alloys. In addition, the behaviour of polyatomic cluster yields as a function of partial oxygen pressure was studied. At partial pressures larger than approximately 10 6Torr, the yields decreased with increasing partial pressures. By inclusion of the post-ionized neutrals, the total secondary particle intensity was increased by a factor of 1.5 for clusters up to atomic masses of around 200 amu. Scanning electron microscopy revealed a varied surface topography with large differences from grain to grain for irradiated samples exposed for doses larger than 1018 atoms/cm2
    Original languageEnglish
    JournalApplications of Surface Science
    Issue number3
    Pages (from-to)383-404
    Publication statusPublished - 1982


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