SPO mirror plate production and coating

Boris Landgraf, Ljubiša Babić, Nicolas M. Barrière, Alex Bayerle, Luigi Castiglione, Maximilien J. Collon, Noë Eenkhoorn, David Girou, Ramses Günther, Enrico Hauser, Yvette Jenkins, Laurens Keek, Ben Okma, Gregorio M. Serano, Aniket Thete, Giuseppe Vacanti, Sjoerd Verhoeckx, Mark Vervest, Luc Voruz, Marco W. BeijersbergenMarcos Bavdaz, Eric Wille, Ivo Ferreira, Sebastiaan Fransen, Brian Shortt, Mark O. Riekerink, Jeroen Haneveld, Arenda Koelewijn, Maurice Wijnperlé, Jan Joost Lankwarden, Bart Schurink, Ronald Start, Coen Van Baren, Paul Hieltjes, Jan Willem Den Herder, Evelyn Handick, Michael Krumrey, Miranda Bradshaw, Vadim Burwitz, Sonny Massahi, Sara Svendsen, Desirée Della Monica Ferreira, Finn E. Christensen, Giuseppe Valsecchi, Geeta Kailla, Gavin Phillips, William Mundon, Ian Chequer, Kevin Ball

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Abstract

The Silicon Pore Optics (SPO) technology has been established as a new type of X-ray optics and will enable future X-ray observatories such as Athena and Arcus. SPO is being developed at cosine Research B.V. together with the European Space Agency (ESA) and academic as well as industrial partners. For Athena, about 150,000 mirror plates are required. With the technology spin-in from the semiconductor industry, mass production processes can be employed to manufacture rectangular SPO mirror plates in high quality, large quantity and at low cost. Over the last years, several aspects of the SPO mirror plates have been reviewed and undergone further developments in terms of effective area, intrinsic behavior of the mirror plates and mass production capability. The paper will provide an overview of most recent SPO plate designs, mirror plate production status and plan forward including reflective coating process as well as mass production developments.

Original languageEnglish
Title of host publicationProceedings of SPIE : Optics for EUV, X-Ray, and Gamma-Ray Astronomy X
EditorsStephen L. O'Dell, Jessica A. Gaskin, Giovanni Pareschi
Number of pages11
PublisherSPIE - International Society for Optical Engineering
Publication date2021
Article number1182207
ISBN (Electronic)9781510644823
DOIs
Publication statusPublished - 2021
EventSPIE Optical Engineering + Applications 2021 - San Diego, United States
Duration: 1 Aug 20215 Aug 2021

Conference

ConferenceSPIE Optical Engineering + Applications 2021
Country/TerritoryUnited States
CitySan Diego
Period01/08/202105/08/2021
SeriesProceedings of SPIE - The International Society for Optical Engineering
Volume11822
ISSN0277-786X

Keywords

  • Athena
  • Coating
  • Mass production
  • Pore optics
  • Silicon
  • SPO
  • Stack
  • Wafer
  • X-ray astronomy
  • X-ray optics
  • X-ray telescopes

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