SPO mirror plate production and coating

Boris Landgraf; Ljubiša Babić; Nicolas M. Barrière; Alex Bayerle; Luigi Castiglione; Maximilien J. Collon; Noë Eenkhoorn; David Girou; Ramses Günther; Enrico Hauser; Yvette Jenkins; Laurens Keek; Ben Okma; Gregorio M. Serano; Aniket Thete; Giuseppe Vacanti; Sjoerd Verhoeckx; Mark Vervest; Luc Voruz; Marco W. Beijersbergen; Marcos Bavdaz; Eric Wille; Ivo Ferreira; Sebastiaan Fransen; Brian Shortt; Mark O. Riekerink; Jeroen Haneveld; Arenda Koelewijn; Maurice Wijnperlé; Jan Joost Lankwarden; Bart Schurink; Ronald Start; Coen Van Baren; Paul Hieltjes; Jan Willem Den Herder; Evelyn Handick; Michael Krumrey; Miranda Bradshaw; Vadim Burwitz; Sonny Massahi; Sara Svendsen; Desirée Della Monica Ferreira; Finn E. Christensen; Giuseppe Valsecchi; Geeta Kailla; Gavin Phillips; William Mundon; Ian Chequer; Kevin Ball

doi:10.1117/12.2594234

SPO mirror plate production and coating

Boris Landgraf, Ljubiša Babić, Nicolas M. Barrière, Alex Bayerle, Luigi Castiglione, Maximilien J. Collon, Noë Eenkhoorn, David Girou, Ramses Günther, Enrico Hauser, Yvette Jenkins, Laurens Keek, Ben Okma, Gregorio M. Serano, Aniket Thete, Giuseppe Vacanti, Sjoerd Verhoeckx, Mark Vervest, Luc Voruz, Marco W. BeijersbergenMarcos Bavdaz, Eric Wille, Ivo Ferreira, Sebastiaan Fransen, Brian Shortt, Mark O. Riekerink, Jeroen Haneveld, Arenda Koelewijn, Maurice Wijnperlé, Jan Joost Lankwarden, Bart Schurink, Ronald Start, Coen Van Baren, Paul Hieltjes, Jan Willem Den Herder, Evelyn Handick, Michael Krumrey, Miranda Bradshaw, Vadim Burwitz, Sonny Massahi, Sara Svendsen, Desirée Della Monica Ferreira, Finn E. Christensen, Giuseppe Valsecchi, Geeta Kailla, Gavin Phillips, William Mundon, Ian Chequer, Kevin Ball

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

The Silicon Pore Optics (SPO) technology has been established as a new type of X-ray optics and will enable future X-ray observatories such as Athena and Arcus. SPO is being developed at cosine Research B.V. together with the European Space Agency (ESA) and academic as well as industrial partners. For Athena, about 150,000 mirror plates are required. With the technology spin-in from the semiconductor industry, mass production processes can be employed to manufacture rectangular SPO mirror plates in high quality, large quantity and at low cost. Over the last years, several aspects of the SPO mirror plates have been reviewed and undergone further developments in terms of effective area, intrinsic behavior of the mirror plates and mass production capability. The paper will provide an overview of most recent SPO plate designs, mirror plate production status and plan forward including reflective coating process as well as mass production developments.

Original language	English
Title of host publication	Proceedings of SPIE : Optics for EUV, X-Ray, and Gamma-Ray Astronomy X
Editors	Stephen L. O'Dell, Jessica A. Gaskin, Giovanni Pareschi
Number of pages	11
Publisher	SPIE - International Society for Optical Engineering
Publication date	2021
Article number	1182207
ISBN (Electronic)	9781510644823
DOIs	https://doi.org/10.1117/12.2594234
Publication status	Published - 2021
Event	SPIE Optical Engineering + Applications 2021 - San Diego, United States Duration: 1 Aug 2021 → 5 Aug 2021

Conference

Conference	SPIE Optical Engineering + Applications 2021
Country/Territory	United States
City	San Diego
Period	01/08/2021 → 05/08/2021

Series	Proceedings of SPIE - The International Society for Optical Engineering
Volume	11822
ISSN	0277-786X

Keywords

Athena
Coating
Mass production
Pore optics
Silicon
SPO
Stack
Wafer
X-ray astronomy
X-ray optics
X-ray telescopes

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Landgraf, B., Babić, L., Barrière, N. M., Bayerle, A., Castiglione, L., Collon, M. J., Eenkhoorn, N., Girou, D., Günther, R., Hauser, E., Jenkins, Y., Keek, L., Okma, B., Serano, G. M., Thete, A., Vacanti, G., Verhoeckx, S., Vervest, M., Voruz, L., ... Ball, K. (2021). SPO mirror plate production and coating. In S. L. O'Dell, J. A. Gaskin, & G. Pareschi (Eds.), Proceedings of SPIE: Optics for EUV, X-Ray, and Gamma-Ray Astronomy X Article 1182207 SPIE - International Society for Optical Engineering. https://doi.org/10.1117/12.2594234

Landgraf, Boris ; Babić, Ljubiša ; Barrière, Nicolas M. et al. / SPO mirror plate production and coating. Proceedings of SPIE: Optics for EUV, X-Ray, and Gamma-Ray Astronomy X. editor / Stephen L. O'Dell ; Jessica A. Gaskin ; Giovanni Pareschi. SPIE - International Society for Optical Engineering, 2021. (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 11822).

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title = "SPO mirror plate production and coating",

abstract = "The Silicon Pore Optics (SPO) technology has been established as a new type of X-ray optics and will enable future X-ray observatories such as Athena and Arcus. SPO is being developed at cosine Research B.V. together with the European Space Agency (ESA) and academic as well as industrial partners. For Athena, about 150,000 mirror plates are required. With the technology spin-in from the semiconductor industry, mass production processes can be employed to manufacture rectangular SPO mirror plates in high quality, large quantity and at low cost. Over the last years, several aspects of the SPO mirror plates have been reviewed and undergone further developments in terms of effective area, intrinsic behavior of the mirror plates and mass production capability. The paper will provide an overview of most recent SPO plate designs, mirror plate production status and plan forward including reflective coating process as well as mass production developments.",

keywords = "Athena, Coating, Mass production, Pore optics, Silicon, SPO, Stack, Wafer, X-ray astronomy, X-ray optics, X-ray telescopes",

author = "Boris Landgraf and Ljubi{\v s}a Babi{\'c} and Barri{\`e}re, {Nicolas M.} and Alex Bayerle and Luigi Castiglione and Collon, {Maximilien J.} and No{\"e} Eenkhoorn and David Girou and Ramses G{\"u}nther and Enrico Hauser and Yvette Jenkins and Laurens Keek and Ben Okma and Serano, {Gregorio M.} and Aniket Thete and Giuseppe Vacanti and Sjoerd Verhoeckx and Mark Vervest and Luc Voruz and Beijersbergen, {Marco W.} and Marcos Bavdaz and Eric Wille and Ivo Ferreira and Sebastiaan Fransen and Brian Shortt and Riekerink, {Mark O.} and Jeroen Haneveld and Arenda Koelewijn and Maurice Wijnperl{\'e} and Lankwarden, {Jan Joost} and Bart Schurink and Ronald Start and {Van Baren}, Coen and Paul Hieltjes and {Den Herder}, {Jan Willem} and Evelyn Handick and Michael Krumrey and Miranda Bradshaw and Vadim Burwitz and Sonny Massahi and Sara Svendsen and Ferreira, {Desir{\'e}e Della Monica} and Christensen, {Finn E.} and Giuseppe Valsecchi and Geeta Kailla and Gavin Phillips and William Mundon and Ian Chequer and Kevin Ball",

note = "Publisher Copyright: {\textcopyright} 2021 SPIE.; SPIE Optical Engineering + Applications 2021 ; Conference date: 01-08-2021 Through 05-08-2021",

year = "2021",

doi = "10.1117/12.2594234",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE - International Society for Optical Engineering",

editor = "O'Dell, {Stephen L.} and Gaskin, {Jessica A.} and Giovanni Pareschi",

booktitle = "Proceedings of SPIE",

}

Landgraf, B, Babić, L, Barrière, NM, Bayerle, A, Castiglione, L, Collon, MJ, Eenkhoorn, N, Girou, D, Günther, R, Hauser, E, Jenkins, Y, Keek, L, Okma, B, Serano, GM, Thete, A, Vacanti, G, Verhoeckx, S, Vervest, M, Voruz, L, Beijersbergen, MW, Bavdaz, M, Wille, E, Ferreira, I, Fransen, S, Shortt, B, Riekerink, MO, Haneveld, J, Koelewijn, A, Wijnperlé, M, Lankwarden, JJ, Schurink, B, Start, R, Van Baren, C, Hieltjes, P, Den Herder, JW, Handick, E, Krumrey, M, Bradshaw, M, Burwitz, V, Massahi, S , Svendsen, S , Ferreira, DDM , Christensen, FE, Valsecchi, G, Kailla, G, Phillips, G, Mundon, W, Chequer, I & Ball, K 2021, SPO mirror plate production and coating. in SL O'Dell, JA Gaskin & G Pareschi (eds), Proceedings of SPIE: Optics for EUV, X-Ray, and Gamma-Ray Astronomy X., 1182207, SPIE - International Society for Optical Engineering, Proceedings of SPIE - The International Society for Optical Engineering, vol. 11822, SPIE Optical Engineering + Applications 2021, San Diego, California, United States, 01/08/2021. https://doi.org/10.1117/12.2594234

SPO mirror plate production and coating. / Landgraf, Boris; Babić, Ljubiša; Barrière, Nicolas M. et al.
Proceedings of SPIE: Optics for EUV, X-Ray, and Gamma-Ray Astronomy X. ed. / Stephen L. O'Dell; Jessica A. Gaskin; Giovanni Pareschi. SPIE - International Society for Optical Engineering, 2021. 1182207 (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 11822).

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - SPO mirror plate production and coating

AU - Landgraf, Boris

AU - Babić, Ljubiša

AU - Barrière, Nicolas M.

AU - Bayerle, Alex

AU - Castiglione, Luigi

AU - Collon, Maximilien J.

AU - Eenkhoorn, Noë

AU - Girou, David

AU - Günther, Ramses

AU - Hauser, Enrico

AU - Jenkins, Yvette

AU - Keek, Laurens

AU - Okma, Ben

AU - Serano, Gregorio M.

AU - Thete, Aniket

AU - Vacanti, Giuseppe

AU - Verhoeckx, Sjoerd

AU - Vervest, Mark

AU - Voruz, Luc

AU - Beijersbergen, Marco W.

AU - Bavdaz, Marcos

AU - Wille, Eric

AU - Ferreira, Ivo

AU - Fransen, Sebastiaan

AU - Shortt, Brian

AU - Riekerink, Mark O.

AU - Haneveld, Jeroen

AU - Koelewijn, Arenda

AU - Wijnperlé, Maurice

AU - Lankwarden, Jan Joost

AU - Schurink, Bart

AU - Start, Ronald

AU - Van Baren, Coen

AU - Hieltjes, Paul

AU - Den Herder, Jan Willem

AU - Handick, Evelyn

AU - Krumrey, Michael

AU - Bradshaw, Miranda

AU - Burwitz, Vadim

AU - Massahi, Sonny

AU - Svendsen, Sara

AU - Ferreira, Desirée Della Monica

AU - Christensen, Finn E.

AU - Valsecchi, Giuseppe

AU - Kailla, Geeta

AU - Phillips, Gavin

AU - Mundon, William

AU - Chequer, Ian

AU - Ball, Kevin

PY - 2021

Y1 - 2021

N2 - The Silicon Pore Optics (SPO) technology has been established as a new type of X-ray optics and will enable future X-ray observatories such as Athena and Arcus. SPO is being developed at cosine Research B.V. together with the European Space Agency (ESA) and academic as well as industrial partners. For Athena, about 150,000 mirror plates are required. With the technology spin-in from the semiconductor industry, mass production processes can be employed to manufacture rectangular SPO mirror plates in high quality, large quantity and at low cost. Over the last years, several aspects of the SPO mirror plates have been reviewed and undergone further developments in terms of effective area, intrinsic behavior of the mirror plates and mass production capability. The paper will provide an overview of most recent SPO plate designs, mirror plate production status and plan forward including reflective coating process as well as mass production developments.

AB - The Silicon Pore Optics (SPO) technology has been established as a new type of X-ray optics and will enable future X-ray observatories such as Athena and Arcus. SPO is being developed at cosine Research B.V. together with the European Space Agency (ESA) and academic as well as industrial partners. For Athena, about 150,000 mirror plates are required. With the technology spin-in from the semiconductor industry, mass production processes can be employed to manufacture rectangular SPO mirror plates in high quality, large quantity and at low cost. Over the last years, several aspects of the SPO mirror plates have been reviewed and undergone further developments in terms of effective area, intrinsic behavior of the mirror plates and mass production capability. The paper will provide an overview of most recent SPO plate designs, mirror plate production status and plan forward including reflective coating process as well as mass production developments.

KW - Athena

KW - Coating

KW - Mass production

KW - Pore optics

KW - Silicon

KW - SPO

KW - Stack

KW - Wafer

KW - X-ray astronomy

KW - X-ray optics

KW - X-ray telescopes

U2 - 10.1117/12.2594234

DO - 10.1117/12.2594234

M3 - Article in proceedings

AN - SCOPUS:85117838818

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Proceedings of SPIE

A2 - O'Dell, Stephen L.

A2 - Gaskin, Jessica A.

A2 - Pareschi, Giovanni

PB - SPIE - International Society for Optical Engineering

T2 - SPIE Optical Engineering + Applications 2021

Y2 - 1 August 2021 through 5 August 2021

ER -

Landgraf B, Babić L, Barrière NM, Bayerle A, Castiglione L, Collon MJ et al. SPO mirror plate production and coating. In O'Dell SL, Gaskin JA, Pareschi G, editors, Proceedings of SPIE: Optics for EUV, X-Ray, and Gamma-Ray Astronomy X. SPIE - International Society for Optical Engineering. 2021. 1182207. (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 11822). doi: 10.1117/12.2594234

SPO mirror plate production and coating

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