SPO mirror plate production and coating

Boris Landgraf, Ljubiša Babić, Nicolas M. Barrière, Alex Bayerle, Luigi Castiglione, Maximilien J. Collon, Noë Eenkhoorn, David Girou, Ramses Günther, Enrico Hauser, Yvette Jenkins, Laurens Keek, Ben Okma, Gregorio M. Serano, Aniket Thete, Giuseppe Vacanti, Sjoerd Verhoeckx, Mark Vervest, Luc Voruz, Marco W. BeijersbergenMarcos Bavdaz, Eric Wille, Ivo Ferreira, Sebastiaan Fransen, Brian Shortt, Mark O. Riekerink, Jeroen Haneveld, Arenda Koelewijn, Maurice Wijnperlé, Jan Joost Lankwarden, Bart Schurink, Ronald Start, Coen Van Baren, Paul Hieltjes, Jan Willem Den Herder, Evelyn Handick, Michael Krumrey, Miranda Bradshaw, Vadim Burwitz, Sonny Massahi, Sara Svendsen, Desirée Della Monica Ferreira, Finn E. Christensen, Giuseppe Valsecchi, Geeta Kailla, Gavin Phillips, William Mundon, Ian Chequer, Kevin Ball

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    The Silicon Pore Optics (SPO) technology has been established as a new type of X-ray optics and will enable future X-ray observatories such as Athena and Arcus. SPO is being developed at cosine Research B.V. together with the European Space Agency (ESA) and academic as well as industrial partners. For Athena, about 150,000 mirror plates are required. With the technology spin-in from the semiconductor industry, mass production processes can be employed to manufacture rectangular SPO mirror plates in high quality, large quantity and at low cost. Over the last years, several aspects of the SPO mirror plates have been reviewed and undergone further developments in terms of effective area, intrinsic behavior of the mirror plates and mass production capability. The paper will provide an overview of most recent SPO plate designs, mirror plate production status and plan forward including reflective coating process as well as mass production developments.

    Original languageEnglish
    Title of host publicationProceedings of SPIE : Optics for EUV, X-Ray, and Gamma-Ray Astronomy X
    EditorsStephen L. O'Dell, Jessica A. Gaskin, Giovanni Pareschi
    Number of pages11
    PublisherSPIE - International Society for Optical Engineering
    Publication date2021
    Article number1182207
    ISBN (Electronic)9781510644823
    Publication statusPublished - 2021
    EventSPIE Optical Engineering + Applications 2021 - San Diego, United States
    Duration: 1 Aug 20215 Aug 2021


    ConferenceSPIE Optical Engineering + Applications 2021
    Country/TerritoryUnited States
    CitySan Diego
    SeriesProceedings of SPIE - The International Society for Optical Engineering


    • Athena
    • Coating
    • Mass production
    • Pore optics
    • Silicon
    • SPO
    • Stack
    • Wafer
    • X-ray astronomy
    • X-ray optics
    • X-ray telescopes


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