Spatial characterization of nanotextured surfaces by visual color imaging

Nikolaj Agentoft Feidenhans'l, Swathi Murthy, Morten H. Madsen, Jan C. Petersen, Rafael J. Taboryski

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Abstract

We present a method using an ordinary color camera to characterize nanostructures from the visual color of the structures. The method provides a macroscale overview image from which micrometer-sized regions can be analyzed independently, hereby revealing long-range spatial variations of the structures. The method is tested on injection-molded polymer line gratings, and the height and filling factor are determined with confidence intervals similar to more advanced imaging scatterometry setups.
Original languageEnglish
Article number9719
JournalApplied Optics
Volume55
Issue number34
Number of pages5
ISSN1559-128X
DOIs
Publication statusPublished - 2016

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