Sodium distribution in thin-film anodic bonding

M. M. Visser, Steen Weichel, P. Storaas, Roger De Reus, A. B. Hanneborg

    Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

    Original languageEnglish
    Title of host publicationProceedings of Eurosensors XIV
    Place of PublicationCopenhagen, Denmark
    Publication date2000
    Pages435-438
    Publication statusPublished - 2000

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