Smooth sub-30 nm stamps for nanoimprint lithography fabricated by standard UV-lithography and oxidation

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of "Trends in Nanotechnology" TNT 2004
Publication date	2004
Publication status	Published - 2004

OpenUrl availability

@inproceedings{3fdff84351e146bd95d4d3bf564f15b2,

title = "Smooth sub-30 nm stamps for nanoimprint lithography fabricated by standard UV-lithography and oxidation",

author = "Olsen, \{Brian Bilenberg\} and Theodor Nielsen and S.R. Enghoff and C. Jeppesen and Anders Larsen and Anders Kristensen",

year = "2004",

language = "English",

booktitle = "Proceedings of {"}Trends in Nanotechnology{"} TNT 2004",

}