Smooth sub-30 nm stamps for nanoimprint lithography fabricated by standard UV-lithography and oxidation

Brian Bilenberg Olsen, Theodor Nielsen, S.R. Enghoff, C. Jeppesen, Anders Larsen, Anders Kristensen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of "Trends in Nanotechnology" TNT 2004
    Publication date2004
    Publication statusPublished - 2004

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