Smart plastic functionalization by nanoimprint and injection molding

Maksim Zalkovskij, Lasse Højlund Thamdrup, Kristian Smistrup, Thomas Andén, Alicia C. Johansson, Niels Jørgen Mikkelsen, Morten Hannibal Madsen, Jørgen Garnæs, Tommy Tungelund Kristiansen, Mads Diemer, Michael Døssing, Daniel Minzari, Peter Torben Tang, Anders Kristensen, Rafael J. Taboryski, Søren Essendrop, Theodor Nielsen, Brian Bilenberg

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    543 Downloads (Pure)

    Abstract

    In this paper, we present a route for making smart functionalized plastic parts by injection molding with sub-micrometer surface structures. The method is based on combining planar processes well known and established within silicon micro and sub-micro fabrication with proven high resolution and high fidelity with truly freeform injection molding inserts. The link between the planar processes and the freeform shaped injection molding inserts is enabled by the use of nanoimprint with flexible molds for the pattern definition combined with unidirectional sputter etching for transferring the pattern. With this approach, we demonstrate the transfer of down to 140 nm wide holes on large areas with good structure fidelity on an injection molding steel insert. The durability of the sub-micrometer structures on the inserts have been investigated by running two production series of 102,000 and 73,000 injection molded parts, respectively, on two different inserts and inspecting the inserts before and after the production series and the molded parts during the production series.
    Original languageEnglish
    Title of host publicationProceedings of SPIE
    Number of pages6
    Volume9423
    PublisherSPIE - International Society for Optical Engineering
    Publication date2015
    DOIs
    Publication statusPublished - 2015
    EventAlternative Lithographic Technologies VII - San Jose, CA, United States
    Duration: 23 Feb 201526 Feb 2015
    Conference number: 7

    Conference

    ConferenceAlternative Lithographic Technologies VII
    Number7
    CountryUnited States
    CitySan Jose, CA
    Period23/02/201526/02/2015
    SeriesProceedings of SPIE, the International Society for Optical Engineering
    Volume9423
    ISSN0277-786X

    Bibliographical note

    Copyright 2015 Society of Photo Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

    Keywords

    • Nanoimprint
    • Injection moulding
    • Plastic
    • Sub-micro structures
    • Surface functionalization

    Cite this

    Zalkovskij, M., Thamdrup, L. H., Smistrup, K., Andén, T., Johansson, A. C., Mikkelsen, N. J., Madsen, M. H., Garnæs, J., Kristiansen, T. T., Diemer, M., Døssing, M., Minzari, D., Tang, P. T., Kristensen, A., Taboryski, R. J., Essendrop, S., Nielsen, T., & Bilenberg, B. (2015). Smart plastic functionalization by nanoimprint and injection molding. In Proceedings of SPIE (Vol. 9423). SPIE - International Society for Optical Engineering. Proceedings of SPIE, the International Society for Optical Engineering, Vol.. 9423 https://doi.org/10.1117/12.2085766