Slot Waveguides with Silicon-Rich Materials for Nonlinear Applications

Meicheng Fu, Xiaoyan Wang, Wenjun Yi, Xiujian Li, Lars Frandsen, Xiaowei Guan*

*Corresponding author for this work

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Slot waveguides based on silicon-rich materials are proposed and experimentally demonstrated, which consist of a silicon-rich oxide (SRO) slot layer sandwiched by two silicon-rich nitride (SRN) layers. Measurements show the waveguides have a low propagation loss of ∼2.2 dB/cm and a 50-μ m-radius micro-ring resonator can achieve a loaded quality factor (Q) of ∼ 105. Four-wave mixing experiments in the slot waveguides reveal a high nonlinearity γ of 16 W-1 m-1 of the waveguide and an averaged nonlinear index n2 of 2.5 x 10-18 m 2/W of the silicon-rich materials, 10 times larger than that of stoichiometric silicon nitride (Si3N4). Supercontinuum generation (SCG) experiments have shown a large fabrication tolerance of such slot waveguides that 1.2 octave spectral broadening in a 1510-nm-wide slot waveguide can be achieved while that is 0.9 octave in a slot waveguide with a width shrinking as large as 220 nm.

Original languageEnglish
Article number9399784
JournalIEEE Photonics Journal
Issue number3
Number of pages9
Publication statusPublished - Jun 2021

Bibliographical note

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© 2009-2012 IEEE.


  • Four-wave mixing
  • Integrated optics
  • Nonlinear photonics
  • Supercontinuum generation


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