Sloped Side Walls in SU-8 Structures with 'Step and Flash'

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the Micro and Nano Engineering 2005 International Conference (Proceedings ID 10D03)
Publication date	2005
Publication status	Published - 2005
Event	31st International Conference on Micro- and Nano-Engineering 2005 - Vienna, Austria Duration: 19 Sept 2005 → 22 Sept 2005 Conference number: 31

Conference	31st International Conference on Micro- and Nano-Engineering 2005
Number	31
Country/Territory	Austria
City	Vienna
Period	19/09/2005 → 22/09/2005

OpenUrl availability

@inproceedings{5d1427f1366646fa8751a912831df6cb,

title = "Sloped Side Walls in SU-8 Structures with 'Step and Flash'",

author = "Maria Nordstr{\"o}m and J{\"o}rg H{\"u}bner and Anja Boisen",

year = "2005",

language = "English",

booktitle = "Proceedings of the Micro and Nano Engineering 2005 International Conference (Proceedings ID 10D03)",

note = "31st International Conference on Micro- and Nano-Engineering 2005, MNE 2005 ; Conference date: 19-09-2005 Through 22-09-2005",

}

TY - GEN

T1 - Sloped Side Walls in SU-8 Structures with 'Step and Flash'

AU - Nordström, Maria

AU - Hübner, Jörg

AU - Boisen, Anja

N1 - Conference code: 31

PY - 2005

Y1 - 2005

M3 - Article in proceedings

BT - Proceedings of the Micro and Nano Engineering 2005 International Conference (Proceedings ID 10D03)

T2 - 31st International Conference on Micro- and Nano-Engineering 2005

Y2 - 19 September 2005 through 22 September 2005

ER -