Sloped side walls in SU-8 structures with 'Step-and-Flash' processing

Maria Nordström, Jörg Hübner, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume83
    Issue number4-9
    Pages (from-to)1269-1272
    ISSN0167-9317
    Publication statusPublished - 2006

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