Sloped Side Walls in SU-8 Structures with 'Step and Flash'

Maria Nordström, Jörg Hübner, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Micro and Nano Engineering 2005 International Conference (Proceedings ID 10D03)
    Publication date2005
    Publication statusPublished - 2005
    Event31st International Conference on Micro- and Nano-Engineering 2005 - Vienna, Austria
    Duration: 19 Sep 200522 Sep 2005
    Conference number: 31

    Conference

    Conference31st International Conference on Micro- and Nano-Engineering 2005
    Number31
    CountryAustria
    CityVienna
    Period19/09/200522/09/2005

    Cite this

    Nordström, M., Hübner, J., & Boisen, A. (2005). Sloped Side Walls in SU-8 Structures with 'Step and Flash'. In Proceedings of the Micro and Nano Engineering 2005 International Conference (Proceedings ID 10D03)
    Nordström, Maria ; Hübner, Jörg ; Boisen, Anja. / Sloped Side Walls in SU-8 Structures with 'Step and Flash'. Proceedings of the Micro and Nano Engineering 2005 International Conference (Proceedings ID 10D03). 2005.
    @inproceedings{5d1427f1366646fa8751a912831df6cb,
    title = "Sloped Side Walls in SU-8 Structures with 'Step and Flash'",
    author = "Maria Nordstr{\"o}m and J{\"o}rg H{\"u}bner and Anja Boisen",
    year = "2005",
    language = "English",
    booktitle = "Proceedings of the Micro and Nano Engineering 2005 International Conference (Proceedings ID 10D03)",

    }

    Nordström, M, Hübner, J & Boisen, A 2005, Sloped Side Walls in SU-8 Structures with 'Step and Flash'. in Proceedings of the Micro and Nano Engineering 2005 International Conference (Proceedings ID 10D03). 31st International Conference on Micro- and Nano-Engineering 2005, Vienna, Austria, 19/09/2005.

    Sloped Side Walls in SU-8 Structures with 'Step and Flash'. / Nordström, Maria; Hübner, Jörg; Boisen, Anja.

    Proceedings of the Micro and Nano Engineering 2005 International Conference (Proceedings ID 10D03). 2005.

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    TY - GEN

    T1 - Sloped Side Walls in SU-8 Structures with 'Step and Flash'

    AU - Nordström, Maria

    AU - Hübner, Jörg

    AU - Boisen, Anja

    PY - 2005

    Y1 - 2005

    M3 - Article in proceedings

    BT - Proceedings of the Micro and Nano Engineering 2005 International Conference (Proceedings ID 10D03)

    ER -

    Nordström M, Hübner J, Boisen A. Sloped Side Walls in SU-8 Structures with 'Step and Flash'. In Proceedings of the Micro and Nano Engineering 2005 International Conference (Proceedings ID 10D03). 2005