Sloped Side Walls in SU-8 Structures with 'Step and Flash'

Maria Nordström, Jörg Hübner, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Micro and Nano Engineering 2005 International Conference (Proceedings ID 10D03)
    Publication date2005
    Publication statusPublished - 2005
    Event31st International Conference on Micro- and Nano-Engineering 2005 - Vienna, Austria
    Duration: 19 Sep 200522 Sep 2005
    Conference number: 31

    Conference

    Conference31st International Conference on Micro- and Nano-Engineering 2005
    Number31
    CountryAustria
    CityVienna
    Period19/09/200522/09/2005

    Cite this