Abstract
We demonstrate grey scale electron beam lithography on functionalized
SU-8 resist for fabrication of single mode solid state dye laser devices. The resist is
doped with Rhodamine 6G perchlorate and the lasers are based on a first order Bragg
grating distributed feedback resonator. The lasers are optically pumped at 532 nm,
and exhibit low lasing threshold from 530 nJ/mm2 and single mode output at selectable
wavelengths from 580 to 630 nm, determined by the grating pitch. The lasers are well
suited for integration into polymer based lab-on-chip circuits for interference based
sensing.
Original language | English |
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Journal | Journal of Micromechanics and Microengineering |
Volume | 15 |
Issue number | 12 |
Pages (from-to) | 2456-2460 |
ISSN | 0960-1317 |
DOIs | |
Publication status | Published - 2005 |