Single-mask Step Integration of High-aspect Ratio Sub-micrometer Channels, Pure Silica Waveguides and Fiber Couplers for Separation Chips

Klaus Bo Mogensen; Fredrik Eriksson; Rikke Pernille Hertzum Nikolajsen; Ómar Gústafsson; Jörg Peter Kutter

Single-mask Step Integration of High-aspect Ratio Sub-micrometer Channels, Pure Silica Waveguides and Fiber Couplers for Separation Chips

Klaus Bo Mogensen
, Fredrik Eriksson
, Rikke Pernille Hertzum Nikolajsen
, Ómar Gústafsson
, Jörg Peter Kutter

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of micro-TAS 2004
Publication date	2004
Publication status	Published - 2004

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@inproceedings{13a10ec1b88240afba6ce9210411cef8,

title = "Single-mask Step Integration of High-aspect Ratio Sub-micrometer Channels, Pure Silica Waveguides and Fiber Couplers for Separation Chips",

author = "Mogensen, \{Klaus Bo\} and Fredrik Eriksson and Nikolajsen, \{Rikke Pernille Hertzum\} and {\'O}mar G{\'u}stafsson and Kutter, \{J{\"o}rg Peter\}",

year = "2004",

language = "English",

booktitle = "Proceedings of micro-TAS 2004",

}

Single-mask Step Integration of High-aspect Ratio Sub-micrometer Channels, Pure Silica Waveguides and Fiber Couplers for Separation Chips. / Mogensen, Klaus Bo; Eriksson, Fredrik; Nikolajsen, Rikke Pernille Hertzum et al.
Proceedings of micro-TAS 2004. 2004.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Single-mask Step Integration of High-aspect Ratio Sub-micrometer Channels, Pure Silica Waveguides and Fiber Couplers for Separation Chips

AU - Mogensen, Klaus Bo

AU - Eriksson, Fredrik

AU - Nikolajsen, Rikke Pernille Hertzum

AU - Gústafsson, Ómar

AU - Kutter, Jörg Peter

PY - 2004

Y1 - 2004

M3 - Article in proceedings

BT - Proceedings of micro-TAS 2004

ER -