Single-mask Step Integration of High-aspect Ratio Sub-micrometer Channels, Pure Silica Waveguides and Fiber Couplers for Separation Chips

Klaus Bo Mogensen, Fredrik Eriksson, Rikke Pernille Hertzum Nikolajsen, Ómar Gústafsson, Jörg Peter Kutter

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of micro-TAS 2004
    Publication date2004
    Publication statusPublished - 2004

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