Single-layer graphene on silicon nitride micromembrane resonators

Silvan Schmid, Tolga Bagci, Emil Zeuthen, Jacob M. Taylor, Patrick K. Herring, Maja C. Cassidy, Charles M. Marcus, Luis Guillermo Villanueva Torrijo, Bartolo Armato, Anja Boisen, Yong Cheol Shin, Jing Kong, Anders S. Sørensen, Koji Usami, Eugene S. Polzik

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    Abstract

    Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN) micromembrane resonators are widely used in force and mass sensing applications, particularly in optomechanics. The metallization of such membranes would enable an electronic integration with the prospect for exciting new devices, such as optoelectromechanical transducers. Here, we add a single-layer graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. The electrostatic coupling of graphene covered membranes is found to be equal to a perfectly conductive membrane, without significantly adding mass, decreasing the superior mechanical quality factor or affecting the optical properties of pure SiN micromembranes. The concept of graphene-SiN resonators allows a broad range of new experiments both in applied physics and fundamental basic research, e.g., for the mechanical, electrical, or optical characterization of graphene.
    Original languageEnglish
    JournalJournal of Applied Physics
    Volume115
    Issue number5
    Pages (from-to)054513
    ISSN0021-8979
    DOIs
    Publication statusPublished - 2014

    Bibliographical note

    © 2014 AIP Publishing LLC

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