Simulations and nanofabrication of photonic crystals based on silicon pillars for mechanical biosensors

Elena Lopez-Aymerich, Maria Dimaki, Winnie E. Svendsen, Sergi Hernandez, Daniel Navarro-Urrios, Mauricio Moreno, Florenci Serras, Albert Romano-Rodriguez

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

In this work we present the results obtained on the simulation and nanofabrication of photonic crystals based on silicon nanopillars. The simulations show the formation of photonic band gaps within 1.31 and 1.89μm, with a gap-to-midgap ratio approaching 40%. The introduction of waveguides and cavities prove the adaptability of these structures to tune the wavelengths allowed to be transmitted through the system within the photonic band gaps. On the other hand, thanks to the use of advanced nanofabrication techniques, the modelled structures have been successfully fabricated.
Original languageEnglish
Title of host publication2021 13th Spanish Conference on Electron Devices (CDE)
Number of pages4
PublisherIEEE
Publication date2021
Pages54-57
ISBN (Print)978-1-6654-4453-8
ISBN (Electronic)978-1-6654-4452-1
DOIs
Publication statusPublished - 2021
Event2021 13th Spanish Conference on Electron Devices - Sevilla, Spain
Duration: 9 Jun 202111 Jun 2021

Conference

Conference2021 13th Spanish Conference on Electron Devices
Country/TerritorySpain
CitySevilla
Period09/06/202111/06/2021
Series2021 13th Spanish Conference on Electron Devices (cde)
ISSN2643-1300

Keywords

  • Photonic crystals
  • FDTD
  • Nanofabrication
  • Waveguides
  • Cavities
  • Silicon

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