Simulations and nanofabrication of photonic crystals based on silicon pillars for mechanical biosensors

Elena Lopez-Aymerich; Maria Dimaki; Winnie E. Svendsen; Sergi Hernandez; Daniel Navarro-Urrios; Mauricio Moreno; Florenci Serras; Albert Romano-Rodriguez

doi:10.1109/CDE52135.2021.9455750

Simulations and nanofabrication of photonic crystals based on silicon pillars for mechanical biosensors

Elena Lopez-Aymerich, Maria Dimaki, Winnie E. Svendsen, Sergi Hernandez, Daniel Navarro-Urrios, Mauricio Moreno, Florenci Serras, Albert Romano-Rodriguez

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

In this work we present the results obtained on the simulation and nanofabrication of photonic crystals based on silicon nanopillars. The simulations show the formation of photonic band gaps within 1.31 and 1.89μm, with a gap-to-midgap ratio approaching 40%. The introduction of waveguides and cavities prove the adaptability of these structures to tune the wavelengths allowed to be transmitted through the system within the photonic band gaps. On the other hand, thanks to the use of advanced nanofabrication techniques, the modelled structures have been successfully fabricated.

Original language	English
Title of host publication	2021 13th Spanish Conference on Electron Devices (CDE)
Number of pages	4
Publisher	IEEE
Publication date	2021
Pages	54-57
ISBN (Print)	978-1-6654-4453-8
ISBN (Electronic)	978-1-6654-4452-1
DOIs	https://doi.org/10.1109/CDE52135.2021.9455750
Publication status	Published - 2021
Event	2021 13th Spanish Conference on Electron Devices - Sevilla, Spain Duration: 9 Jun 2021 → 11 Jun 2021 Conference number: 13 https://www.cde-conf.org/

Conference

Conference	2021 13th Spanish Conference on Electron Devices
Number	13
Country/Territory	Spain
City	Sevilla
Period	09/06/2021 → 11/06/2021
Internet address	https://www.cde-conf.org/

Keywords

Photonic crystals
FDTD
Nanofabrication
Waveguides
Cavities
Silicon

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10.1109/CDE52135.2021.9455750

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@inproceedings{2a461f252f29443382dbfbbebe53f4a2,

title = "Simulations and nanofabrication of photonic crystals based on silicon pillars for mechanical biosensors",

abstract = "In this work we present the results obtained on the simulation and nanofabrication of photonic crystals based on silicon nanopillars. The simulations show the formation of photonic band gaps within 1.31 and 1.89μm, with a gap-to-midgap ratio approaching 40%. The introduction of waveguides and cavities prove the adaptability of these structures to tune the wavelengths allowed to be transmitted through the system within the photonic band gaps. On the other hand, thanks to the use of advanced nanofabrication techniques, the modelled structures have been successfully fabricated.",

keywords = "Photonic crystals, FDTD, Nanofabrication, Waveguides, Cavities, Silicon",

author = "Elena Lopez-Aymerich and Maria Dimaki and Svendsen, {Winnie E.} and Sergi Hernandez and Daniel Navarro-Urrios and Mauricio Moreno and Florenci Serras and Albert Romano-Rodriguez",

year = "2021",

doi = "10.1109/CDE52135.2021.9455750",

language = "English",

isbn = "978-1-6654-4453-8",

pages = "54--57",

booktitle = "2021 13th Spanish Conference on Electron Devices (CDE)",

publisher = "IEEE",

address = "United States",

note = "2021 13th Spanish Conference on Electron Devices, CDE 2021 ; Conference date: 09-06-2021 Through 11-06-2021",

url = "https://www.cde-conf.org/",

}

Lopez-Aymerich, E, Dimaki, M , Svendsen, WE, Hernandez, S, Navarro-Urrios, D, Moreno, M, Serras, F & Romano-Rodriguez, A 2021, Simulations and nanofabrication of photonic crystals based on silicon pillars for mechanical biosensors. in 2021 13th Spanish Conference on Electron Devices (CDE). IEEE, pp. 54-57, 2021 13th Spanish Conference on Electron Devices, Sevilla, Spain, 09/06/2021. https://doi.org/10.1109/CDE52135.2021.9455750

TY - GEN

T1 - Simulations and nanofabrication of photonic crystals based on silicon pillars for mechanical biosensors

AU - Lopez-Aymerich, Elena

AU - Dimaki, Maria

AU - Svendsen, Winnie E.

AU - Hernandez, Sergi

AU - Navarro-Urrios, Daniel

AU - Moreno, Mauricio

AU - Serras, Florenci

AU - Romano-Rodriguez, Albert

N1 - Conference code: 13

PY - 2021

Y1 - 2021

N2 - In this work we present the results obtained on the simulation and nanofabrication of photonic crystals based on silicon nanopillars. The simulations show the formation of photonic band gaps within 1.31 and 1.89μm, with a gap-to-midgap ratio approaching 40%. The introduction of waveguides and cavities prove the adaptability of these structures to tune the wavelengths allowed to be transmitted through the system within the photonic band gaps. On the other hand, thanks to the use of advanced nanofabrication techniques, the modelled structures have been successfully fabricated.

AB - In this work we present the results obtained on the simulation and nanofabrication of photonic crystals based on silicon nanopillars. The simulations show the formation of photonic band gaps within 1.31 and 1.89μm, with a gap-to-midgap ratio approaching 40%. The introduction of waveguides and cavities prove the adaptability of these structures to tune the wavelengths allowed to be transmitted through the system within the photonic band gaps. On the other hand, thanks to the use of advanced nanofabrication techniques, the modelled structures have been successfully fabricated.

KW - Photonic crystals

KW - FDTD

KW - Nanofabrication

KW - Waveguides

KW - Cavities

KW - Silicon

U2 - 10.1109/CDE52135.2021.9455750

DO - 10.1109/CDE52135.2021.9455750

M3 - Article in proceedings

SN - 978-1-6654-4453-8

SP - 54

EP - 57

BT - 2021 13th Spanish Conference on Electron Devices (CDE)

PB - IEEE

T2 - 2021 13th Spanish Conference on Electron Devices

Y2 - 9 June 2021 through 11 June 2021

ER -

Simulations and nanofabrication of photonic crystals based on silicon pillars for mechanical biosensors

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