Simulated SAM A-scans on multilayer MEMS components

Jakob Janting, Dirch Hjorth Petersen, Christoffer Greisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    A spreadsheet program for simulation of Scanning Acoustic Microscopy (SAM) A-scans on multilayer structures has been developed. Using this program, structure variations in samples can be analysed better. Further samples can be prepared to get optimal signal for enhanced failure and materials analysis. Input values for the sample materials are acoustic impedance, speed of sound, and thickness. The simulation is based on calculations of reflection, transmission coefficients, and number N of waves received by the transducer at the same time by reflection at the same interfaces in different order. The calculation of N, the program interface, and simulated A-scans on MEMS test structures for a pressure sensor are presented. (C) 2002 Elsevier Science Ltd. All rights reserved.
    Original languageEnglish
    JournalMicroelectronics Reliability
    Volume42
    Issue number9-11
    Pages (from-to)1811-1814
    ISSN0026-2714
    Publication statusPublished - 2002
    Event13th European Symposium on the Reliability of Electron Devices, Failure Physics and Analysis - Rimini, Italy
    Duration: 7 Oct 200211 Oct 2002

    Conference

    Conference13th European Symposium on the Reliability of Electron Devices, Failure Physics and Analysis
    CountryItaly
    CityRimini
    Period07/10/200211/10/2002

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