Simulated SAM A-scans on multilayer MEMS components

Jakob Janting, Dirch Hjorth Petersen, Christoffer Greisen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Original language	English
Title of host publication	Proceedings of Workshop on MEMS Sensor Packaging.
Number of pages	2
Publication date	2003
ISBN (Print)	87-89935-46-2
Publication status	Published - 2003
Event	Workshop on MEMS Sensor Packaging - Technical University of Denmark, Lyngby, Denmark Duration: 20 Mar 2003 → 21 Mar 2003

Conference	Workshop on MEMS Sensor Packaging
Location	Technical University of Denmark
Country/Territory	Denmark
City	Lyngby
Period	20/03/2003 → 21/03/2003

Access to Document

@inproceedings{79a2309996de4d03bb66091477fe2d64,

title = "Simulated SAM A-scans on multilayer MEMS components",

author = "Jakob Janting and Petersen, {Dirch Hjorth} and Christoffer Greisen",

year = "2003",

language = "English",

isbn = "87-89935-46-2",

booktitle = "Proceedings of Workshop on MEMS Sensor Packaging.",

note = "Workshop on MEMS Sensor Packaging ; Conference date: 20-03-2003 Through 21-03-2003",

}