Abstract
Superhydrophobic silicon nanostructures were fabricated by anisotropic etching of silicon coated with a thin hydrophobic layer. At certain etch parameters, overhanging nanostructures form at the apexes of the rod-shaped tips, This leads to superoleophobic behavior for several oily liquids with contact angles up to 152 degrees and roll-off angle down to 8 degrees. Such nonlithographic nanoscale overhanging Structures can also be added to silicon nanograss by deposition of a thin SiO2 layer, which equips the silicon rods with 100-300 nm sized overhanging Structures. This is a simple, fast, nonlithographic method for introducing amphiphobic behavior on a Surface consisting of vertically aligned micro- or nanostructures.
Original language | English |
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Journal | Journal of Physical Chemistry Part C: Nanomaterials and Interfaces |
Volume | 114 |
Issue number | 7 |
Pages (from-to) | 2936-2940 |
ISSN | 1932-7447 |
DOIs | |
Publication status | Published - 2010 |