Simple and compact ESPI system for displacement measurements on specular reflecting or optical rough surfaces

R.S. Hansen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

    Original languageEnglish
    Title of host publicationSelected papers
    EditorsO.V. Angelsky
    Place of PublicationBellingham, WA
    PublisherThe International Society for Optical Engineering
    Publication date2002
    Pages178-183
    ISBN (Print)0-8194-4346-8
    Publication statusPublished - 2002
    Event5th International Conference on Correlation Optics - Chernivtsi, Ukraine
    Duration: 10 May 200113 May 2001
    Conference number: 5

    Conference

    Conference5th International Conference on Correlation Optics
    Number5
    CountryUkraine
    CityChernivtsi
    Period10/05/200113/05/2001
    SeriesSPIE Proceedings Series, 4607

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