Silicon rich nitride thin films and waveguides

Karin Nordström Andersen, P.C. Nielsen, Hugh Taylor Philipp, Winnie Edith Svendsen, Hans Mertens

Research output: Contribution to conference › Paper › Research › peer-review

Original language	English
Publication date	2002
Publication status	Published - 2002
Event	Annual Meeting of the Danish Optical Society 2002 - Risø, Denmark Duration: 21 Nov 2002 → 22 Nov 2002

Conference	Annual Meeting of the Danish Optical Society 2002
Country/Territory	Denmark
City	Risø
Period	21/11/2002 → 22/11/2002

OpenUrl availability

@conference{d23ca6c01a824e7fa437eadfe15072e8,

title = "Silicon rich nitride thin films and waveguides",

author = "Andersen, \{Karin Nordstr{\"o}m\} and P.C. Nielsen and Philipp, \{Hugh Taylor\} and Svendsen, \{Winnie Edith\} and Hans Mertens",

year = "2002",

language = "English",

note = "Annual Meeting of the Danish Optical Society 2002 ; Conference date: 21-11-2002 Through 22-11-2002",

}