Silicon rich nitride thin films and waveguides

Karin Nordström Andersen, P.C. Nielsen, Hugh Taylor Philipp, Winnie Edith Svendsen, Hans Mertens

Research output: Contribution to conferencePaperResearchpeer-review

Original languageEnglish
Publication date2002
Publication statusPublished - 2002
EventAnnual meeting of the Danish Optical Society 2002 - Risø, Denmark
Duration: 21 Nov 200222 Nov 2002

Conference

ConferenceAnnual meeting of the Danish Optical Society 2002
CountryDenmark
CityRisø
Period21/11/200222/11/2002

Cite this

Andersen, K. N., Nielsen, P. C., Philipp, H. T., Svendsen, W. E., & Mertens, H. (2002). Silicon rich nitride thin films and waveguides. Paper presented at Annual meeting of the Danish Optical Society 2002, Risø, Denmark.