Silicon rich nitride thin films and waveguides

Karin Nordström Andersen, P.C. Nielsen, Winnie Edith Svendsen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	OSA/IPR
Publication date	2002
Pages	1-3
Publication status	Published - 2002
Event	OSA Integrated Photonics Research - Vancouver, Canada Duration: 17 Jul 2002 → 19 Jul 2002

Conference	OSA Integrated Photonics Research
Country/Territory	Canada
City	Vancouver
Period	17/07/2002 → 19/07/2002

OpenUrl availability

@inproceedings{c4bfb4ea1a9b4a4199047cd8b9b8c24d,

title = "Silicon rich nitride thin films and waveguides",

author = "Andersen, {Karin Nordstr{\"o}m} and P.C. Nielsen and Svendsen, {Winnie Edith}",

year = "2002",

language = "English",

pages = "1--3",

booktitle = "OSA/IPR",

note = "OSA Integrated Photonics Research, IPR 2002 ; Conference date: 17-07-2002 Through 19-07-2002",

}