Silicon rich nitride thin films and waveguides

Karin Nordström Andersen, P.C. Nielsen, Winnie Edith Svendsen

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationOSA/IPR
Publication date2002
Pages1-3
Publication statusPublished - 2002
EventOSA Integrated Photonics Research - Vancouver, Canada
Duration: 17 Jul 200219 Jul 2002

Conference

ConferenceOSA Integrated Photonics Research
CountryCanada
CityVancouver
Period17/07/200219/07/2002

Cite this

Andersen, K. N., Nielsen, P. C., & Svendsen, W. E. (2002). Silicon rich nitride thin films and waveguides. In OSA/IPR (pp. 1-3)