Abstract
A silicon photonic polarization multiplexing (PM) sensor featuring both a large range and a high resolution is proposed and experimentally demonstrated. The sensor includes a Fabry–Pérot (FP) resonator and a microring resonator (MRR) functioning as the sensing parts. With PM technology, the FP resonator only works on the transverse-electric mode while the MRR only on the transverse-magnetic mode. Thus, the proposed sensor can simultaneously achieve a large range with a short FP resonator and a high resolution with a high-Q MRR. Measured results show a range of 113 °C and a resolution of 0.06 °C for temperature sensing, and a range of 0.58 RIU (refractive index unit) with the resolution of 0.002 RIU for analyte refractive index sensing.
Original language | English |
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Article number | 5870 |
Journal | Sensors |
Volume | 20 |
Issue number | 20 |
Number of pages | 8 |
ISSN | 1424-8220 |
DOIs | |
Publication status | Published - 2020 |
Keywords
- Polarization multiplexing
- Silicon photonic sensor
- Fabry–Pérot resonator
- Microring resonator
- Large range
- High resolution