Silicon microphones - a Danish perspective

Siebe Bouwstra, Torben Storgaard-Larsen, Patrick Scheeper, Jens Gulløv, J. Bay, Matthias Müllenborn, Pirmin Rombach

    Research output: Contribution to journalConference articleResearchpeer-review

    Abstract

    Two application areas of microphones are discussed, those for precision measurement and those for hearing instruments. Silicon microphones are under investigation for both areas, and Danish industry plays a key role in both. The opportunities of silicon, as well as the challenges and expectations, are discussed. For precision measurement the challenge for silicon is large, while for hearing instruments silicon seems to be very promising.
    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Volume8
    Issue number2
    Pages (from-to)64-68
    ISSN0960-1317
    DOIs
    Publication statusPublished - 1998
    Event8th Workshop on Micromachining, Micromechanics and Microsystems - Southampton University, Southampton, United States
    Duration: 31 Aug 19972 Sep 1997
    Conference number: 8
    http://iopscience.iop.org/0960-1317/8/2

    Workshop

    Workshop8th Workshop on Micromachining, Micromechanics and Microsystems
    Number8
    LocationSouthampton University
    CountryUnited States
    CitySouthampton
    Period31/08/199702/09/1997
    Internet address

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