Silicon microphones - a Danish perspective

Siebe Bouwstra; Torben Storgaard-Larsen; Patrick Scheeper; Jens Gulløv; J. Bay; Matthias Müllenborn; Pirmin Rombach

doi:10.1088/0960-1317/8/2/005

Silicon microphones - a Danish perspective

Siebe Bouwstra, Torben Storgaard-Larsen, Patrick Scheeper, Jens Gulløv, J. Bay, Matthias Müllenborn, Pirmin Rombach

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

Two application areas of microphones are discussed, those for precision measurement and those for hearing instruments. Silicon microphones are under investigation for both areas, and Danish industry plays a key role in both. The opportunities of silicon, as well as the challenges and expectations, are discussed. For precision measurement the challenge for silicon is large, while for hearing instruments silicon seems to be very promising.

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	8
Issue number	2
Pages (from-to)	64-68
ISSN	0960-1317
DOIs	https://doi.org/10.1088/0960-1317/8/2/005
Publication status	Published - 1998
Event	8th Workshop on Micromachining, Micromechanics and Microsystems - Southampton University, Southampton, United States Duration: 31 Aug 1997 → 2 Sept 1997 Conference number: 8 http://iopscience.iop.org/0960-1317/8/2

Workshop

Workshop	8th Workshop on Micromachining, Micromechanics and Microsystems
Number	8
Location	Southampton University
Country/Territory	United States
City	Southampton
Period	31/08/1997 → 02/09/1997
Internet address	http://iopscience.iop.org/0960-1317/8/2

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10.1088/0960-1317/8/2/005

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title = "Silicon microphones - a Danish perspective",

abstract = "Two application areas of microphones are discussed, those for precision measurement and those for hearing instruments. Silicon microphones are under investigation for both areas, and Danish industry plays a key role in both. The opportunities of silicon, as well as the challenges and expectations, are discussed. For precision measurement the challenge for silicon is large, while for hearing instruments silicon seems to be very promising. ",

author = "Siebe Bouwstra and Torben Storgaard-Larsen and Patrick Scheeper and Jens Gull{\o}v and J. Bay and Matthias M{\"u}llenborn and Pirmin Rombach",

year = "1998",

doi = "10.1088/0960-1317/8/2/005",

language = "English",

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T1 - Silicon microphones - a Danish perspective

AU - Bouwstra, Siebe

AU - Storgaard-Larsen, Torben

AU - Scheeper, Patrick

AU - Gulløv, Jens

AU - Bay, J.

AU - Müllenborn, Matthias

AU - Rombach, Pirmin

N1 - Conference code: 8

PY - 1998

Y1 - 1998

N2 - Two application areas of microphones are discussed, those for precision measurement and those for hearing instruments. Silicon microphones are under investigation for both areas, and Danish industry plays a key role in both. The opportunities of silicon, as well as the challenges and expectations, are discussed. For precision measurement the challenge for silicon is large, while for hearing instruments silicon seems to be very promising.

AB - Two application areas of microphones are discussed, those for precision measurement and those for hearing instruments. Silicon microphones are under investigation for both areas, and Danish industry plays a key role in both. The opportunities of silicon, as well as the challenges and expectations, are discussed. For precision measurement the challenge for silicon is large, while for hearing instruments silicon seems to be very promising.

U2 - 10.1088/0960-1317/8/2/005

DO - 10.1088/0960-1317/8/2/005

M3 - Conference article

SN - 0960-1317

VL - 8

SP - 64

EP - 68

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 2

T2 - 8th Workshop on Micromachining, Micromechanics and Microsystems

Y2 - 31 August 1997 through 2 September 1997

ER -

Silicon microphones - a Danish perspective

Abstract

Workshop

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