Silicon microphones - a Danish perspective

Siebe Bouwstra, Patrick Scheeper, Torben Storgaard-Larsen, Jens Gulløv, Jesper Bay, Pirmin Rombach, Matthias Müllenborn

    Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

    Original languageEnglish
    Title of host publicationMME '97
    Publication date1997
    Publication statusPublished - 1997
    Event8th Workshop on Micromachining, Micromechanics and Microsystems - Southampton University, Southampton, United States
    Duration: 31 Aug 19972 Sep 1997
    Conference number: 8


    Workshop8th Workshop on Micromachining, Micromechanics and Microsystems
    LocationSouthampton University
    CountryUnited States
    Internet address

    Cite this

    Bouwstra, S., Scheeper, P., Storgaard-Larsen, T., Gulløv, J., Bay, J., Rombach, P., & Müllenborn, M. (1997). Silicon microphones - a Danish perspective. In MME '97 (pp. 250-257)