Silicon microphones - a Danish perspective

Siebe Bouwstra; Patrick Scheeper; Torben Storgaard-Larsen; Jens Gulløv; Jesper Bay; Pirmin Rombach; Matthias Müllenborn

Silicon microphones - a Danish perspective

Siebe Bouwstra, Patrick Scheeper, Torben Storgaard-Larsen, Jens Gulløv, Jesper Bay, Pirmin Rombach, Matthias Müllenborn

Research output: Chapter in Book/Report/Conference proceeding › Book chapter › Research › peer-review

Original language	English
Title of host publication	MME '97
Publication date	1997
Pages	250-257
Publication status	Published - 1997
Event	8th Workshop on Micromachining, Micromechanics and Microsystems - Southampton University, Southampton, United States Duration: 31 Aug 1997 → 2 Sept 1997 Conference number: 8 http://iopscience.iop.org/0960-1317/8/2

Workshop

Workshop	8th Workshop on Micromachining, Micromechanics and Microsystems
Number	8
Location	Southampton University
Country/Territory	United States
City	Southampton
Period	31/08/1997 → 02/09/1997
Internet address	http://iopscience.iop.org/0960-1317/8/2

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@inbook{97ba0599c1e74d9e9ae692c17bda8875,

title = "Silicon microphones - a Danish perspective",

author = "Siebe Bouwstra and Patrick Scheeper and Torben Storgaard-Larsen and Jens Gull{\o}v and Jesper Bay and Pirmin Rombach and Matthias M{\"u}llenborn",

year = "1997",

language = "English",

pages = "250--257",

booktitle = "MME '97",

note = "8th Workshop on Micromachining, Micromechanics and Microsystems, MME '97 ; Conference date: 31-08-1997 Through 02-09-1997",

url = "http://iopscience.iop.org/0960-1317/8/2",

}

TY - CHAP

T1 - Silicon microphones - a Danish perspective

AU - Bouwstra, Siebe

AU - Scheeper, Patrick

AU - Storgaard-Larsen, Torben

AU - Gulløv, Jens

AU - Bay, Jesper

AU - Rombach, Pirmin

AU - Müllenborn, Matthias

N1 - Conference code: 8

PY - 1997

Y1 - 1997

M3 - Book chapter

SP - 250

EP - 257

BT - MME '97

T2 - 8th Workshop on Micromachining, Micromechanics and Microsystems

Y2 - 31 August 1997 through 2 September 1997

ER -