Silicon and Cleanroom Processing

Research output: Chapter in Book/Report/Conference proceeding › Book chapter › Research › peer-review

Original language	English
Title of host publication	Microsystem Engineering of Lab-on-a-Chip Devices
Editors	Oliver Geschke, Henning Klank, Pieter Telleman
Number of pages	249
Publisher	VCH-Wiley, Weinheim
Publication date	2003
ISBN (Print)	3-527-30733-8
Publication status	Published - 2003

OpenUrl availability

@inbook{5ac090a9b68d4457bdedf0520c503084,

title = "Silicon and Cleanroom Processing",

author = "J{\o}rgensen, \{Anders Michael\} and Mogensen, \{Klaus Bo\}",

year = "2003",

language = "English",

isbn = "3-527-30733-8",

editor = "Oliver Geschke and Henning Klank and Pieter Telleman",

booktitle = "Microsystem Engineering of Lab-on-a-Chip Devices",

publisher = "VCH-Wiley, Weinheim",

}