Sidewall roughness measurement of photonic wires and photonic crystals

Mikael Svalgaard; Lars Hagedorn Frandsen; Jørgen Garnæs; A. Kühle

doi:10.1109/CLEOE-IQEC.2007.4386571

Sidewall roughness measurement of photonic wires and photonic crystals

Mikael Svalgaard
, Lars Hagedorn Frandsen
, Jørgen Garnæs
, A. Kühle

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

558 Downloads (Orbit)

Abstract

The performance of nanophotonic building blocks such as photonic wires and photonic crystals are rapidly improving, with very low propagation loss and very high cavity Q-factors being reported. In order to facilitate further improvements in performance the ability to quantitatively measure topological imperfections such as sidewall roughness on a sub-nm scale becomes essential. In this paper we use atomic force microscopy (AFM) on tilted samples to obtain the most detailed sidewall roughness measurements yet on nanophotonic structures.

Original language	English
Title of host publication	European Conference on Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007.
Publisher	IEEE
Publication date	2007
Pages	1-1
ISBN (Print)	978-1-4244-0931-0
DOIs	https://doi.org/10.1109/CLEOE-IQEC.2007.4386571
Publication status	Published - 2007
Event	Conference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007 - Munich, Germany Duration: 17 Jun 2007 → 22 Jun 2007 http://2007.cleoeurope.org/

Conference

Conference	Conference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007
Country/Territory	Germany
City	Munich
Period	17/06/2007 → 22/06/2007
Internet address	http://2007.cleoeurope.org/

Bibliographical note

Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

Access to Document

10.1109/CLEOE-IQEC.2007.4386571

FrandsenFinal published version, 351 KB

OpenUrl availability

Check availability in DTU Findit

Cite this

@inproceedings{96d92eb65c544f8da693db8b7b31759f,

title = "Sidewall roughness measurement of photonic wires and photonic crystals",

abstract = "The performance of nanophotonic building blocks such as photonic wires and photonic crystals are rapidly improving, with very low propagation loss and very high cavity Q-factors being reported. In order to facilitate further improvements in performance the ability to quantitatively measure topological imperfections such as sidewall roughness on a sub-nm scale becomes essential. In this paper we use atomic force microscopy (AFM) on tilted samples to obtain the most detailed sidewall roughness measurements yet on nanophotonic structures.",

author = "Mikael Svalgaard and Frandsen, \{Lars Hagedorn\} and J{\o}rgen Garn{\ae}s and A. K{\"u}hle",

note = "Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; Conference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007, CLEO/Europe-IQEC 2007 ; Conference date: 17-06-2007 Through 22-06-2007",

year = "2007",

doi = "10.1109/CLEOE-IQEC.2007.4386571",

language = "English",

isbn = "978-1-4244-0931-0",

pages = "1--1",

booktitle = "European Conference on Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007.",

publisher = "IEEE",

address = "United States",

url = "http://2007.cleoeurope.org/",

}

Svalgaard, M, Frandsen, LH, Garnæs, J & Kühle, A 2007, Sidewall roughness measurement of photonic wires and photonic crystals. in European Conference on Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007.. IEEE, pp. 1-1, Conference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007, Munich, Germany, 17/06/2007. https://doi.org/10.1109/CLEOE-IQEC.2007.4386571

Sidewall roughness measurement of photonic wires and photonic crystals. / Svalgaard, Mikael; Frandsen, Lars Hagedorn; Garnæs, Jørgen et al.
European Conference on Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007.. IEEE, 2007. p. 1-1.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Sidewall roughness measurement of photonic wires and photonic crystals

AU - Svalgaard, Mikael

AU - Frandsen, Lars Hagedorn

AU - Garnæs, Jørgen

AU - Kühle, A.

N1 - Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

PY - 2007

Y1 - 2007

N2 - The performance of nanophotonic building blocks such as photonic wires and photonic crystals are rapidly improving, with very low propagation loss and very high cavity Q-factors being reported. In order to facilitate further improvements in performance the ability to quantitatively measure topological imperfections such as sidewall roughness on a sub-nm scale becomes essential. In this paper we use atomic force microscopy (AFM) on tilted samples to obtain the most detailed sidewall roughness measurements yet on nanophotonic structures.

AB - The performance of nanophotonic building blocks such as photonic wires and photonic crystals are rapidly improving, with very low propagation loss and very high cavity Q-factors being reported. In order to facilitate further improvements in performance the ability to quantitatively measure topological imperfections such as sidewall roughness on a sub-nm scale becomes essential. In this paper we use atomic force microscopy (AFM) on tilted samples to obtain the most detailed sidewall roughness measurements yet on nanophotonic structures.

U2 - 10.1109/CLEOE-IQEC.2007.4386571

DO - 10.1109/CLEOE-IQEC.2007.4386571

M3 - Article in proceedings

SN - 978-1-4244-0931-0

SP - 1

EP - 1

BT - European Conference on Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007.

PB - IEEE

T2 - Conference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007

Y2 - 17 June 2007 through 22 June 2007

ER -

Sidewall roughness measurement of photonic wires and photonic crystals

Abstract

Conference

Bibliographical note

Access to Document

OpenUrl availability

Fingerprint

Cite this